E. W. Becker, K. Bier, and W. Henkes, Strahlen aus kondensierten Atomen und Molekeln im Hochvakuum, Zeitschrift f???r Physik, vol.146, issue.3, p.333, 1956.
DOI : 10.1007/BF01330428

R. Campargue, Progress in overexpanded supersonic jets and skimmed molecular beams in free-jet zones of silence, The Journal of Physical Chemistry, vol.88, issue.20, p.4466, 1984.
DOI : 10.1021/j150664a004

J. Lapujoulade, A statistical model for the scattering of atoms from randomly stepped surfaces, Surface Science, vol.108, issue.3, p.526, 1981.
DOI : 10.1016/0039-6028(81)90563-X

J. P. Cowin, C. Yu, S. J. Sibener, and L. Wharton, HD scattering from Pt(111): Rotational excitation probabilities, The Journal of Chemical Physics, vol.79, issue.7, p.3537, 1983.
DOI : 10.1063/1.446208

U. Harten, J. P. Toennies, and C. , Molecular beam translational spectroscopy of physisorption bound states of molecules on metal surfaces. I. HD on Cu(111) and Au(111) single crystal surfaces, The Journal of Chemical Physics, vol.85, issue.4, p.2249, 1986.
DOI : 10.1063/1.451121

K. Schönhammer and O. Gunnarsson, Sticking and inelastic scattering at metal surfaces: The electron-hole pair mechanism, Surface Science, vol.117, issue.1-3, p.53, 1982.
DOI : 10.1016/0039-6028(82)90484-8

H. Metiu and J. W. Gadzuk, Theory of rate processes at metal surfaces. II. The role of substrate electronic excitations, The Journal of Chemical Physics, vol.74, issue.4, p.2641, 1981.
DOI : 10.1063/1.441335

F. O. Goodman, The dynamics of simple cubic lattices. I. Applications to the theory of thermal accommodation coefficients, Journal of Physics and Chemistry of Solids, vol.23, issue.9, p.1269, 1962.
DOI : 10.1016/0022-3697(62)90173-7

F. O. Goodman and Y. H. Wachman, Formula for Thermal Accommodation Coefficients, The Journal of Chemical Physics, vol.46, issue.6, p.2376, 1967.
DOI : 10.1063/1.1841046

G. Doyen and T. B. Grimley, A model Hamiltonian for phonon energy transfer in gas???solid collisions, Surface Science, vol.91, issue.1, p.51, 1980.
DOI : 10.1016/0039-6028(80)90071-0

G. Blyholder, Molecular Orbital View of Chemisorbed Carbon Monoxide, The Journal of Physical Chemistry, vol.68, issue.10, p.2772, 1964.
DOI : 10.1021/j100792a006

J. C. Campuzano, The adsorption of carbon monoxide by the transition metals, in The Chemical Physics of Solids Surfaces and HeterogeneousCatalysis : Chemisorption Systems, p.389, 1990.

G. R. Darling and S. Holloway, The dissociation of diatomic molecules at surfaces, Reports on Progress in Physics, vol.58, issue.12, p.1595, 1995.
DOI : 10.1088/0034-4885/58/12/001

J. A. Serri, J. C. Tully, and M. J. Cardillo, The influence of steps on the desorption kinetics of NO from Pt(111), The Journal of Chemical Physics, vol.79, issue.3, p.1530, 1983.
DOI : 10.1063/1.445946

M. Head-gordon, J. C. Tully, C. T. Rettner, C. B. Mullins, and D. J. Auerbach, On the nature of trapping and desorption at high surface temperatures. Theory and experiments for the Ar???Pt(111) system, The Journal of Chemical Physics, vol.94, issue.2, p.1516, 1991.
DOI : 10.1063/1.460695

S. L. Tang, M. B. Lee, J. D. Beckerle, M. A. Hines, and S. T. Ceyer, Effect of translational energy on chemisorption: Evidence for a precursor to molecular chemisorption, The Journal of Chemical Physics, vol.82, issue.6, p.2826, 1985.
DOI : 10.1063/1.448282

C. T. Rettner and C. B. Mullins, on Pt(111): Dissociation via direct population of a molecularly chemisorbed precursor at high incidence kinetic energy, The Journal of Chemical Physics, vol.94, issue.2, p.1626, 1991.
DOI : 10.1063/1.459966

H. A. Michelsen, C. T. Rettner, and D. J. Auerbach, The Adsorption of Hydrogen at Copper Surfaces: A Model System for the Study of Activated Adsorption, Surface Reactions : Springer Series in Surface Sciences, p.185, 1994.
DOI : 10.1007/978-3-642-78746-1_6

K. W. Kolasinski, W. Nessler, K. Bornscheuer, and E. Hasselbrink, adsorption on Si(100): On the importance of lattice excitations in the reaction dynamics, The Journal of Chemical Physics, vol.101, issue.8, p.7082, 1994.
DOI : 10.1063/1.468419

G. Comsa and R. David, Dynamical parameters of desorbing molecules, Surface Science Reports, vol.5, issue.4, p.145, 1985.
DOI : 10.1016/0167-5729(85)90009-3

G. D. Kubiak, G. O. Sitz, and R. N. Zare, Recombinative desorption dynamics: Molecular hydrogen from Cu(110) and Cu(111), The Journal of Chemical Physics, vol.83, issue.5, p.2538, 1985.
DOI : 10.1063/1.449300

K. D. Rendulic, Sticking and desorption: a review, Surface Science, vol.272, issue.1-3, p.34, 1992.
DOI : 10.1016/0039-6028(92)91419-C

K. Christmann, G. Ertl, and T. Pignet, Adsorption of hydrogen on a Pt(111) surface, Surface Science, vol.54, issue.2, p.365, 1976.
DOI : 10.1016/0039-6028(76)90232-6

D. A. King, Thermal desorption from metal surfaces: A review, Surface Science, vol.47, issue.1, p.384, 1975.
DOI : 10.1016/0039-6028(75)90302-7

D. Menzel and R. Gomer, Desorption from Metal Surfaces by Low???Energy Electrons, The Journal of Chemical Physics, vol.41, issue.11, p.3311, 1964.
DOI : 10.1063/1.1725730

M. L. Knotek and P. J. Feibelman, Stability of ionically bonded surfaces in ionizing environments, Surface Science, vol.90, issue.1, p.78, 1979.
DOI : 10.1016/0039-6028(79)90011-6

C. N. Hinshelwood, The Kinetics of Chemical Change (1940)

D. D. Eley and E. K. , Parahydrogen Conversion on Tungsten, Nature, vol.146, issue.3699, p.401, 1940.
DOI : 10.1038/146401d0

C. Cheng, S. R. Lucas, H. Gutleben, W. J. Choyke, and J. T. Yates-jr, Atomic hydrogen-driven halogen extraction from silicon(100): Eley-Rideal surface kinetics, Journal of the American Chemical Society, vol.114, issue.4, p.1249, 1992.
DOI : 10.1021/ja00030a020

W. H. Weinberg, Kinetics of surfaces reactions, Dynamics of Gas-Surface Interactions, p.171, 1991.

D. V. Shalashilin, B. Jackson, and M. Persson, Eley???Rideal and hot-atom reactions of H(D) atoms with D(H)-covered Cu(111) surfaces; quasiclassical studies, The Journal of Chemical Physics, vol.110, issue.22, p.11038, 1999.
DOI : 10.1063/1.479040

S. Wehner and J. Küppers, Interaction of gaseous D atoms with alkyl halides adsorbed on Pt(111), H/Pt(111), and C/Pt(111) surfaces: Hot-atom and Eley???Rideal reactions. II. Ethyl iodide, The Journal of Chemical Physics, vol.111, issue.7, pp.3218-3225, 1999.
DOI : 10.1063/1.479601

A. Hodgson, J. Moryl, and H. B. Zao, Scattering of vibrationally excited H2 from Cu(111), Chemical Physics Letters, vol.182, issue.2, p.152, 1991.
DOI : 10.1016/0009-2614(91)80120-M

G. R. Darling and S. Holloway, The role of parallel momentum in the dissociative adsorption of H2 at highly corrugated surfaces, Surface Science, vol.304, issue.3, p.461, 1994.
DOI : 10.1016/0039-6028(94)91328-5

H. P. Steinrück, M. Luger, A. Winkler, and K. D. Rendulic, on various flat and stepped nickel surfaces, Physical Review B, vol.32, issue.8, p.5032, 1985.
DOI : 10.1103/PhysRevB.32.5032

A. Winkler and K. D. Rendulic, Adsorption kinetics for hydrogen adsorption on nickel and coadsorption of hydrogen and oxygen, Surface Science, vol.118, issue.1-2, p.19, 1982.
DOI : 10.1016/0039-6028(82)90010-3

J. Harris, On the adsorption and desorption of H2 at metal surfaces, Applied Physics A Solids and Surfaces, vol.48, issue.1, p.63, 1988.
DOI : 10.1007/BF00619699

H. A. Michelsen and D. J. Auerbach, A critical examination of data on the dissociative adsorption and associative desorption of hydrogen at copper surfaces, The Journal of Chemical Physics, vol.94, issue.11, p.7502, 1991.
DOI : 10.1063/1.460182

L. Schröter, S. Küchenhoff, R. David, W. Brenig, and H. Zacharias, Vibrational activation in associative desorption of hydrogen from Pd(100), Surface Science, vol.261, issue.1-3, p.243, 1992.
DOI : 10.1016/0039-6028(92)90236-Y

K. W. Kolasinski, (111) SURFACES, International Journal of Modern Physics B, vol.09, issue.21, p.2753, 1995.
DOI : 10.1142/S0217979295001038

U. Bischler, P. Sandl, E. Bertel, T. Brunner, and W. Brenig, Sticking, adsorption, and absorption of atomic H on Cu(110), Physical Review Letters, vol.70, issue.23, p.3603, 1993.
DOI : 10.1103/PhysRevLett.70.3603

T. Kammler and J. Küppers, Interaction of H atoms with Cu(111) surfaces: Adsorption, absorption, and abstraction, The Journal of Chemical Physics, vol.111, issue.17, p.8115, 1999.
DOI : 10.1063/1.480145

J. Boh, G. Eilmsteiner, K. D. Rendulic, and A. Winkler, Adsorption and abstraction of atomic hydrogen (deuterium) on Al(100), Surface Science, vol.395, issue.1, p.98, 1998.
DOI : 10.1016/S0039-6028(97)00620-1

H. Premm, H. Pölzl, and A. Winkler, Dynamics and kinetics of subsurface absorption and desorption for the system hydrogen (deuterium)???Ni(111), Surface Science, vol.401, issue.3, p.444, 1998.
DOI : 10.1016/S0039-6028(98)00092-2

K. D. Rendulic, G. Anger, and A. Winkler, Wide range nozzle beam adsorption data for the systems H2/nickel and H2/Pd(100), Surface Science, vol.208, issue.3, p.404, 1989.
DOI : 10.1016/0039-6028(89)90010-1

A. D. Johnson, K. J. Maynard, S. P. Daley, Q. Y. Yang, and S. T. Ceyer, Hydrogen embedded in Ni: Production by incident atomic hydrogen and detection by high-resolution electron energy loss, Physical Review Letters, vol.67, issue.7, p.927, 1991.
DOI : 10.1103/PhysRevLett.67.927

T. Kammler, S. Wehner, and J. Küppers, Interaction of thermal H atoms with Ni(100)???H surfaces: through surface penetration and adsorbed hydrogen abstraction, Surface Science, vol.339, issue.1-2, p.125, 1995.
DOI : 10.1016/0039-6028(95)00584-6

H. Pölzl, G. Strohmeier, and A. Winkler, Adsorption and abstraction of H(D) on clean and modified Al(111) and Ni(111) surfaces, The Journal of Chemical Physics, vol.110, issue.2, p.1154, 1999.
DOI : 10.1063/1.478157

J. Kim and J. Lee, Kinetics, mechanism, and dynamics of the gas-phase H(D) atom reaction with adsorbed D(H) atom on Pt(111), The Journal of Chemical Physics, vol.113, issue.7, p.2856, 2000.
DOI : 10.1063/1.1305912

S. Wehner and J. Küppers, Abstraction of D adsorbed on Pt(111) surfaces with gaseous H atoms, The Journal of Chemical Physics, vol.108, issue.8, p.3353, 1998.
DOI : 10.1063/1.475734

T. Kammler, D. Kolovos-vellianitis, and J. Küppers, A hot-atom reaction kinetic model for H abstraction from solid surfaces, Surface Science, vol.460, issue.1-3, p.91, 2000.
DOI : 10.1016/S0039-6028(00)00521-5

C. T. Rettner, Dynamics of the direct reaction of hydrogen atoms adsorbed on Cu(111) with hydrogen atoms incident from the gas phase, Physical Review Letters, vol.69, issue.2, p.383, 1992.
DOI : 10.1103/PhysRevLett.69.383

C. T. Rettner and D. J. Auerbach, Dynamics of the Eley-Rideal Reaction of D Atoms with H Atoms Adsorbed on Cu(111): Vibrational and Rotational State Distributions of the HD Product, Physical Review Letters, vol.74, issue.22, p.4551, 1995.
DOI : 10.1103/PhysRevLett.74.4551

C. T. Rettner and D. J. Auerbach, Quantum???state distributions for the HD product of the direct reaction of H(D)/Cu(111) with D(H) incident from the gas phase, The Journal of Chemical Physics, vol.104, issue.7, p.2732, 1996.
DOI : 10.1063/1.471006

P. Kratzer and W. Brenig, Highly excited molecules from Eley-Rideal reactions, Surface Science, vol.254, issue.1-3, p.275, 1991.
DOI : 10.1016/0039-6028(91)90659-G

B. Jackson and M. Persson, A quantum mechanical study of recombinative desorption of atomic hydrogen on a metal surface, The Journal of Chemical Physics, vol.96, issue.3, p.2378, 1992.
DOI : 10.1063/1.462034

B. Jackson and M. Persson, Effects of isotopic substitution on Eley???Rideal reactions and adsorbate???mediated trapping, The Journal of Chemical Physics, vol.103, issue.14, p.6257, 1995.
DOI : 10.1063/1.470404

P. Kratzer and W. Brenig, The dynamics of desorption induced by atomic hydrogen: HD/Cu(111), Zeitschrift f??r Physik B Condensed Matter, vol.70, issue.4, p.571, 1996.
DOI : 10.1007/s002570050078

G. Eilmsteiner and A. Winkler, Rovibrational state distribution of deuterium molecules resulting from D-atom interaction with Ni(110), Surface Science, vol.366, issue.3, p.750, 1996.
DOI : 10.1016/0039-6028(96)00935-1

K. Takayanagi, Y. Tanishiro, S. Takahashi, and M. Takahashi, Structure analysis of Si(111)-7 ?? 7 reconstructed surface by transmission electron diffraction, Surface Science, vol.164, issue.2-3, p.367, 1985.
DOI : 10.1016/0039-6028(85)90753-8

R. E. Schlier and H. E. Farnsworth, Structure and Adsorption Characteristics of Clean Surfaces of Germanium and Silicon, The Journal of Chemical Physics, vol.30, issue.4, p.917, 1959.
DOI : 10.1063/1.1730126

J. D. Levine, Structural and electronic model of negative electron affinity on the Si/Cs/O surface, Surface Science, vol.34, issue.1, p.90, 1973.
DOI : 10.1016/0039-6028(73)90190-8

M. J. Cardillo and W. R. Lambert, Order and structure of semiconductor surfaces: An assessment with He diffraction, Surface Science, vol.168, issue.1-3, p.724, 1986.
DOI : 10.1016/0039-6028(86)90904-0

J. Dabrowski and H. Müssig, Silicon surfaces and formation of interfaces, p.151, 2000.
DOI : 10.1142/3615

J. J. Boland, Role of bond-strain in the chemistry of hydrogen on the Si(100) surface, Surface Science, vol.261, issue.1-3, p.17, 1992.
DOI : 10.1016/0039-6028(92)90214-Q

C. C. Cheng, J. T. Yates, and J. , H-induced surface restructuring on Si(100): Formation of higher hydrides, Physical Review B, vol.43, issue.5, p.4041, 1991.
DOI : 10.1103/PhysRevB.43.4041

T. Sakurai and H. D. Hagstrum, Interplay of the monohydride phase and a newly discovered dihydride phase in chemisorption of H on Si(100)2 ?? 1, Physical Review B, vol.14, issue.4, p.1593, 1976.
DOI : 10.1103/PhysRevB.14.1593

S. M. Gates, R. R. Kunz, and C. M. Greenlief, Silicon hydride etch products from the reaction of atomic hydrogen with Si(100), Surface Science, vol.207, issue.2-3, p.364, 1989.
DOI : 10.1016/0039-6028(89)90129-5

C. Lutterloh, M. Wicklein, A. Dinger, J. Biener, and J. Küppers, Thermal stability and hydrogen induced abstraction of silyl groups on Si(100) surfaces, Surface Science, vol.498, issue.1-2, p.123, 2002.
DOI : 10.1016/S0039-6028(01)01515-1

H. Yang and E. F. Greene, Symmetry changes in He scattering from a Si(111) surface exposed to H atoms, Surface Science, vol.440, issue.3, p.327, 1999.
DOI : 10.1016/S0039-6028(99)00838-9

G. Schulze and M. Henzler, Adsorption of atomic hydrogen on clean cleaved silicon (111), Surface Science, vol.124, issue.2-3, p.336, 1983.
DOI : 10.1016/0039-6028(83)90795-1

U. Höfer, L. Li, and T. F. Heinz, Desorption of hydrogen from Si(100)2??1 at low coverages: The influence of ??-bonded dimers on the kinetics, Physical Review B, vol.45, issue.16, p.9485, 1992.
DOI : 10.1103/PhysRevB.45.9485

G. A. Reider, U. Höfer, and T. F. Heinz, Desorption kinetics of hydrogen from the Si(111)7??7 surface, The Journal of Chemical Physics, vol.94, issue.5, p.4080, 1991.
DOI : 10.1063/1.460660

K. Cho, E. Kaxiras, and J. D. Joannopoulos, surface, Physical Review Letters, vol.79, issue.25, p.5078, 1997.
DOI : 10.1103/PhysRevLett.79.5078

URL : https://hal.archives-ouvertes.fr/hal-01264135

Y. Park, J. Bang, and J. Lee, Angular distribution of D2 desorbing from the monodeuteride phase on a Si(100) surface, Surface Science, vol.283, issue.1-3, p.209, 1993.
DOI : 10.1016/0039-6028(93)90982-P

Y. Park, J. Kim, and J. Lee, in thermal desorption from Si(100), The Journal of Chemical Physics, vol.98, issue.1, p.757, 1993.
DOI : 10.1063/1.464623

K. W. Kolasinski, S. F. Shane, and R. Zare, Internal???state distribution of recombinative hydrogen desorption from Si(100), The Journal of Chemical Physics, vol.96, issue.5, p.3995, 1992.
DOI : 10.1063/1.461849

S. F. Shane, K. W. Kolasinski, and R. N. Zare, desorbed from mono??? and dihydride species on Si(100), The Journal of Chemical Physics, vol.97, issue.5, p.3704, 1992.
DOI : 10.1063/1.462952

K. W. Kolasinski, W. Nessler, A. De-meijere, and E. Hasselbrink, Hydrogen adsorption on and desorption from Si: Considerations on the applicability of detailed balance, Physical Review Letters, vol.72, issue.9, p.1356, 1994.
DOI : 10.1103/PhysRevLett.72.1356

W. Brenig and M. F. Hilf, on Si(100) and Si(111), Journal of Physics: Condensed Matter, vol.13, issue.9, p.61, 2001.
DOI : 10.1088/0953-8984/13/9/201

P. Kratzer, B. Hammer, and J. K. Nørskov, The coupling between adsorption dynamics and the surface structure: H2 on Si(100), Chemical Physics Letters, vol.229, issue.6, p.645, 1994.
DOI : 10.1016/0009-2614(94)01100-1

E. J. Buehler and J. J. Boland, Dimer Preparation That Mimics the Transition State for the Adsorption of H2 on the Si(100)-2 x 1 Surface, Science, vol.290, issue.5491, p.506, 2000.
DOI : 10.1126/science.290.5491.506

T. Sagara, T. Kuga, K. Tanaka, T. Shibataka, T. Fujimoto et al., Molecules Thermally Desorbed from Si(100) and Ge(100) Surfaces, Physical Review Letters, vol.89, issue.8, p.86101, 2002.
DOI : 10.1103/PhysRevLett.89.086101

A. Biedermann, E. Knoesel, Z. Hu, and T. F. Heinz, on Si(100) Induced by Atomic H, Physical Review Letters, vol.83, issue.9, p.1810, 1999.
DOI : 10.1103/PhysRevLett.83.1810

F. M. Zimmermann and X. Pan, : Solution of the Barrier Puzzle, Physical Review Letters, vol.85, issue.3, p.618, 2000.
DOI : 10.1103/PhysRevLett.85.618

W. Brenig, H. J. Kreuzer, and S. H. Payne, Reactions of hydrogen on silicon:??????Kinetics and dynamics, Physical Review B, vol.67, issue.20, p.205419, 2003.
DOI : 10.1103/PhysRevB.67.205419

M. Dürr, M. B. Raschke, E. Pehlke, and U. Höfer, Structure Sensitive Reaction Channels of Molecular Hydrogen on Silicon Surfaces, Physical Review Letters, vol.86, issue.1, p.123, 2001.
DOI : 10.1103/PhysRevLett.86.123

M. B. Raschke and U. Höfer, Influence of steps and defects on the dissociative adsorption of molecular hydrogen on silicon surfaces, Applied Physics B: Lasers and Optics, vol.68, issue.3, p.649, 1999.
DOI : 10.1007/s003400050680

M. Dürr, M. Raschke, and U. Höfer, Effect of beam energy and surface temperature on the dissociative adsorption of H2 on Si(001), The Journal of Chemical Physics, vol.111, issue.23, p.10411, 1999.
DOI : 10.1063/1.480395

J. R. Abelson, J. Doyle, L. Mandrell, A. M. Myers, and N. Maley, ???Si:H by reactive magnetron sputtering, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.8, issue.3, p.1364, 1990.
DOI : 10.1116/1.576883

D. D. Koleske, S. M. Gates, and J. A. Schultz, Facile abstraction of chemisorbed D on Si(100) by atomic H, The Journal of Chemical Physics, vol.99, issue.7, p.5619, 1993.
DOI : 10.1063/1.465955

D. D. Koleske, S. M. Gates, and B. Jackson, Atomic H abstraction of surface H on Si: An Eley???Rideal mechanism?, The Journal of Chemical Physics, vol.101, issue.4, p.3301, 1994.
DOI : 10.1063/1.467577

M. C. Flowers, N. B. Jonathan, A. Morris, and S. Wright, A quasi-equilibrium model for the uptake kinetics of hydrogen atoms on Si(100), Surface Science, vol.396, issue.1-3, p.227, 1998.
DOI : 10.1016/S0039-6028(97)00672-9

H. Doshita, K. Ohtani, and A. Namiki, Dynamical aspect of Cl2 reaction on Si surfaces, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.16, issue.1, p.265, 1998.
DOI : 10.1116/1.580981

A. Dinger, C. Lutterloh, and J. Küppers, Interaction of hydrogen atoms with Si(111) surfaces: Adsorption, abstraction, and etching, The Journal of Chemical Physics, vol.114, issue.12, p.5338, 2001.
DOI : 10.1063/1.1351158

S. Shimokawa, A. Namiki, T. Ando, Y. Sato, and J. Lee, Kinetics study on the hydrogen atom-induced abstraction and associative desorption of deuterium adatoms from the Si(100) surface at 573 K, The Journal of Chemical Physics, vol.112, issue.1, p.356, 2000.
DOI : 10.1063/1.480586

F. Khanom, A. Aoki, F. Rahman, and A. Namiki, D abstraction by H on Si() surfaces, Surface Science, vol.536, issue.1-3, p.191, 2003.
DOI : 10.1016/S0039-6028(03)00591-0

F. Khanom, S. Shimokawa, S. Inanaga, A. Namiki, M. N. Gamo et al., Rate equations for collision-induced desorption and abstraction in the reaction system H(g)+D/Si(100)???D2,HD at 573 K, The Journal of Chemical Physics, vol.113, issue.9, p.3792, 2000.
DOI : 10.1063/1.1288031

E. Hayakawa, F. Khanom, T. Yoshifuku, S. Shimokawa, A. Namiki et al., Hot-complex-mediated abstraction and desorption of D adatoms by H on Si(100), Physical Review B, vol.65, issue.3, p.33405, 2001.
DOI : 10.1103/PhysRevB.65.033405

A. Kubo, Y. Ishii, and M. Kitajima, Abstraction and desorption kinetics in the reaction of H+D/Si(100) and the relation to surface structure, The Journal of Chemical Physics, vol.117, issue.24, p.11336, 2002.
DOI : 10.1063/1.1522394

J. Kang, S. K. Jo, and J. Lee, Molecular hydrogen evolution from bulk crystalline silicon pretreated with thermal hydrogen atoms, Physical Review B, vol.59, issue.20, p.13170, 1999.
DOI : 10.1103/PhysRevB.59.13170

S. A. Buntin, Hyperthermal H atom interactions with D/Si(100): Effects of incident H atom kinetic energy on the removal of adsorbed D, The Journal of Chemical Physics, vol.105, issue.5, p.2066, 1996.
DOI : 10.1063/1.472077

S. A. Buntin, Dynamics of the H atom abstraction of D adsorbed on Si(100), The Journal of Chemical Physics, vol.108, issue.4, p.1601, 1998.
DOI : 10.1063/1.475530

F. Shoji, K. Kusumura, and K. Oura, A Si(100)-2??1: H monohydride surface studied by low-energy recoil-ion spectroscopy, Surface Science Letters, vol.280, issue.1-2, p.247, 1993.
DOI : 10.1016/0167-2584(93)90779-I

P. Kratzer, B. Hammer, and J. K. Nørskov, on Si(100), Physical Review B, vol.51, issue.19, p.13432, 1995.
DOI : 10.1103/PhysRevB.51.13432

P. Kratzer, Reaction dynamics of atomic hydrogen with the hydrogenated Si(001) (2??1) surface, The Journal of Chemical Physics, vol.106, issue.16, p.6752, 1997.
DOI : 10.1063/1.473672

P. Kratzer, The dynamics of the H + D/Si(001) reaction: a trajectory study based on ab initio potentials, Chemical Physics Letters, vol.288, issue.2-4, p.396, 1998.
DOI : 10.1016/S0009-2614(98)00318-2

U. Hansen and P. Vogl, Hydrogen passivation of silicon surfaces: A classical molecular-dynamics study, Physical Review B, vol.57, issue.20, p.13295, 1998.
DOI : 10.1103/PhysRevB.57.13295

E. S. Tok, J. R. Engstrom, and H. C. Kang, Precursor states of atomic hydrogen on the Si(100)-(2??1) surface, The Journal of Chemical Physics, vol.118, issue.7, p.3294, 2003.
DOI : 10.1063/1.1536959

H. J. Drouhin, M. Picard, and D. Paget, Ultrahigh vacuum sample transfer device with broad temperature range, Review of Scientific Instruments, vol.60, issue.6, p.1167, 1989.
DOI : 10.1063/1.1140279

R. N. Zare and P. J. Dagdigian, Tunable Laser Fluorescence Method for Product State Analysis, Science, vol.185, issue.4153, p.739, 1974.
DOI : 10.1126/science.185.4153.739

E. E. Marinero, C. T. Rettner, and R. N. Zare, Quantum-State-Specific Detection of Molecular Hydrogen by Three-Photon Ionization, Physical Review Letters, vol.48, issue.19, p.1323, 1982.
DOI : 10.1103/PhysRevLett.48.1323

A. C. Kummel, G. O. Sitz, and R. N. Zare, Determination of population and alignment of the ground state using two???photon nonresonant excitation, The Journal of Chemical Physics, vol.85, issue.12, p.6874, 1986.
DOI : 10.1063/1.451374

W. Meier, H. Rottke, H. Zacharias, and K. K. Welge, ??????=0,3) states, The Journal of Chemical Physics, vol.83, issue.9, p.4360, 1985.
DOI : 10.1063/1.449051

D. J. Kligler and C. K. Rhodes, State, Physical Review Letters, vol.40, issue.5, p.309, 1978.
DOI : 10.1103/PhysRevLett.40.309

D. J. Kliger, J. Bokor, and C. K. Rhodes, state, Physical Review A, vol.21, issue.2, p.607, 1980.
DOI : 10.1103/PhysRevA.21.607

K. P. Huber and G. Herzberg, Molecular Spectra and Molecular Structure IV Constants of Diatomic Molecules (1979) p240 et suivantes

K. D. Rinnen, M. A. Buntine, D. A. Kliner, and R. N. Zare, internal???state distributions by (2+1) resonance???enhanced multiphoton ionization, The Journal of Chemical Physics, vol.95, issue.1, p.214, 1991.
DOI : 10.1063/1.461478

G. Herzberg, Molecular Spectra and Molecular Structure I Spectra of Diatomic Molecules (1950) p130 et suivantes

J. Slevin and W. Stirling, Radio frequency atomic hydrogen beam source, Review of Scientific Instruments, vol.52, issue.11, p.1780, 1981.
DOI : 10.1063/1.1136497

E. J. Murphy and J. H. , Atomic hydrogen beam source: a convenient, extended cavity, microwave discharge design, Review of Scientific Instruments, vol.50, issue.5, p.635, 1979.
DOI : 10.1063/1.1135898

B. P. Paolini and M. A. Khakoo, An intense atomic hydrogen source with a movable nozzle output, Review of Scientific Instruments, vol.69, issue.9, p.3132, 1998.
DOI : 10.1063/1.1149072

S. Shimokawa, A. Namiki, T. Ando, Y. Sato, and J. Lee, Kinetics study on the hydrogen atom-induced abstraction and associative desorption of deuterium adatoms from the Si(100) surface at 573 K, The Journal of Chemical Physics, vol.112, issue.1, p.356, 2000.
DOI : 10.1063/1.480586

F. Jansen, I. Chen, and M. A. Machonkin, On the thermal dissociation of hydrogen, Journal of Applied Physics, vol.66, issue.12, p.5749, 1989.
DOI : 10.1063/1.343643

W. E. Lamb and R. C. Retherford, Fine Structure of the Hydrogen Atom. Part I, Physical Review, vol.79, issue.4, p.549, 1950.
DOI : 10.1103/PhysRev.79.549

M. Balooch and D. R. Olander, Reactions of modulated molecular beams with pyrolytic graphite. III. Hydrogen, The Journal of Chemical Physics, vol.63, issue.11, p.4772, 1975.
DOI : 10.1063/1.431274

B. Van-zyl and M. W. Gealy, New molecular???dissociation furnace for H and O atom sources, Review of Scientific Instruments, vol.57, issue.3, p.359, 1986.
DOI : 10.1063/1.1138946

U. Bischler and E. Bertel, Simple source of atomic hydrogen for ultrahigh vacuum applications, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.11, issue.2, p.458, 1993.
DOI : 10.1116/1.578754

R. Larrabee, Spectral Emissivity of Tungsten???, Journal of the Optical Society of America, vol.49, issue.6, p.619, 1959.
DOI : 10.1364/JOSA.49.000619

C. Eibl, G. Lackner, and A. Winkler, Quantitative characterization of a highly effective atomic hydrogen doser, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.16, issue.5, p.2979, 1998.
DOI : 10.1116/1.581449

K. G. Tschersich and V. Von-bonin, Formation of an atomic hydrogen beam by a hot capillary, Journal of Applied Physics, vol.84, issue.8, p.4065, 1998.
DOI : 10.1063/1.368619

K. G. Tschersich, Intensity of a source of atomic hydrogen based on a hot capillary, Journal of Applied Physics, vol.87, issue.5, p.2565, 2000.
DOI : 10.1063/1.372220

I. Barin, Thermochemical Data of Pure Substances, pp.635-781, 1995.
DOI : 10.1002/9783527619825

J. N. Smith and W. L. Fite, on Tungsten, The Journal of Chemical Physics, vol.37, issue.4, p.898, 1962.
DOI : 10.1063/1.1733181

URL : https://hal.archives-ouvertes.fr/hal-01115685

W. Steckelmacher, Knudsen flow 75 years on: the current state of the art for flow of rarefied gases in tubes and systems, Reports on Progress in Physics, vol.49, issue.10, p.1083, 1986.
DOI : 10.1088/0034-4885/49/10/001

P. Clausing, ???ber die Strahlformung bei der Molekularstr???mung, Zeitschrift f???r Physik, vol.66, issue.7-8, p.471, 1930.
DOI : 10.1007/BF01402029

D. R. Olander and V. Kruger, Molecular Beam Sources Fabricated from Multichannel Arrays. III. The Exit Density Problem, Journal of Applied Physics, vol.41, issue.7, p.2769, 1970.
DOI : 10.1063/1.1659313

S. Dushman, Scientific Foundation of Vacuum Technique, p58 et suivantes, 1962.

A. Kutana, B. Makarenko, and J. W. Rabalais, Kinetics of H atom adsorption on Si(100) at 500???650 K, The Journal of Chemical Physics, vol.119, issue.22, p.11906, 2003.
DOI : 10.1063/1.1624827

P. Bratu, W. Brenig, A. Gross, M. Hartmann, U. Höfer et al., Reaction dynamics of molecular hydrogen on silicon surfaces, Physical Review B, vol.54, issue.8, p.5978, 1996.
DOI : 10.1103/PhysRevB.54.5978

C. T. Rettner, H. A. Michelsen, D. J. Auerbach, and C. B. Mullins, desorbing from Cu(111), The Journal of Chemical Physics, vol.94, issue.11, p.7499, 1991.
DOI : 10.1063/1.460181

C. T. Rettner, Dynamics of the direct reaction of hydrogen atoms adsorbed on Cu(111) with hydrogen atoms incident from the gas phase, Physical Review Letters, vol.69, issue.2, p.383, 1992.
DOI : 10.1103/PhysRevLett.69.383

H. A. Michelsen, C. T. Rettner, and D. J. Auerbach, desorption from Cu(111): The role of molecular rotational motion in activated adsorption-desorption dynamics, Physical Review Letters, vol.69, issue.18, p.2678, 1992.
DOI : 10.1103/PhysRevLett.69.2678

P. Kratzer and W. Brenig, The dynamics of desorption induced by atomic hydrogen: HD/Cu(111), Zeitschrift f??r Physik B Condensed Matter, vol.70, issue.4, p.571, 1996.
DOI : 10.1007/s002570050078

D. V. Shalashilin, B. Jackson, and M. Persson, Eley???Rideal and hot-atom reactions of H(D) atoms with D(H)-covered Cu(111) surfaces; quasiclassical studies, The Journal of Chemical Physics, vol.110, issue.22, p.11038, 1999.
DOI : 10.1063/1.479040

Y. Park, J. Bang, and J. Lee, Angular distribution of D2 desorbing from the monodeuteride phase on a Si(100) surface, Surface Science, vol.283, issue.1-3, p.209, 1993.
DOI : 10.1016/0039-6028(93)90982-P

W. Brenig, H. J. Kreuzer, and S. H. Payne, Reactions of hydrogen on silicon:??????Kinetics and dynamics, Physical Review B, vol.67, issue.20, p.205419, 2003.
DOI : 10.1103/PhysRevB.67.205419

T. Sagara, T. Kuga, K. Tanaka, T. Shibataka, T. Fujimoto et al., Molecules Thermally Desorbed from Si(100) and Ge(100) Surfaces, Physical Review Letters, vol.89, issue.8, p.86101, 2002.
DOI : 10.1103/PhysRevLett.89.086101

W. Brenig and M. F. Hilf, on Si(100) and Si(111), Journal of Physics: Condensed Matter, vol.13, issue.9, p.61, 2001.
DOI : 10.1088/0953-8984/13/9/201

K. W. Kolasinski, W. Nessler, A. De-meijere, and E. Hasselbrink, Hydrogen adsorption on and desorption from Si: Considerations on the applicability of detailed balance, Physical Review Letters, vol.72, issue.9, p.1356, 1994.
DOI : 10.1103/PhysRevLett.72.1356

F. Khanom, S. Shimokawa, S. Inanaga, A. Namiki, M. N. Gamo et al., Rate equations for collision-induced desorption and abstraction in the reaction system H(g)+D/Si(100)???D2,HD at 573 K, The Journal of Chemical Physics, vol.113, issue.9, p.3792, 2000.
DOI : 10.1063/1.1288031

S. Shimokawa, A. Namiki, T. Ando, Y. Sato, and J. Lee, Kinetics study on the hydrogen atom-induced abstraction and associative desorption of deuterium adatoms from the Si(100) surface at 573 K, The Journal of Chemical Physics, vol.112, issue.1, p.356, 2000.
DOI : 10.1063/1.480586

A. Vittadini and A. Selloni, Density functional study of H2 desorption from monohydride and dihydride Si(100) surfaces, Chemical Physics Letters, vol.235, issue.3-4, p.334, 1995.
DOI : 10.1016/0009-2614(95)00129-R

E. Hayakawa, F. Khanom, T. Yoshifuku, S. Shimokawa, A. Namiki et al., Hot-complex-mediated abstraction and desorption of D adatoms by H on Si(100), Physical Review B, vol.65, issue.3, p.33405, 2001.
DOI : 10.1103/PhysRevB.65.033405

F. Shoji, K. Kusumura, and K. Oura, A Si(100)-2??1: H monohydride surface studied by low-energy recoil-ion spectroscopy, Surface Science Letters, vol.280, issue.1-2, p.247, 1993.
DOI : 10.1016/0167-2584(93)90779-I

P. Kratzer, B. Hammer, and J. K. Nørskov, on Si(100), Physical Review B, vol.51, issue.19, p.13432, 1995.
DOI : 10.1103/PhysRevB.51.13432

C. Flytzanis, H. Kuze, M. Châtelet, J. Häger, and H. Walther, Impact of Topography on Molecular-Beam Scattering on Surfaces: The NO-Diamond Case, Physical Review Letters, vol.61, issue.6, p.730, 1988.
DOI : 10.1103/PhysRevLett.61.730