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. Finalement, Si dans Domex est similaire à celui du ?c-Si réalisé par les autres méthodes de plasma (RF, HW- CVD?) Il commence en général par une couche amorphe Quand le contenu en hydrogène dans cette couche est suffisamment grand, la transition de phase commence. Une fois que les cristallites apparaissent, la fraction cristalline évolue en fonction du temps de dépôt. Cette évolution est volumique et par conséquent

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