A. R. West, Solid state chemistry and its applications, 1984.

K. Maex, M. R. Baklanov, D. Shamiryan, F. Iacopi, S. H. Brongersma et al., Low dielectric constant materials for microelectronics, Journal of Applied Physics, vol.93, issue.11, pp.8793-8841, 2003.
DOI : 10.1063/1.1567460

D. A. Bruggeman, Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen, Ann. Phys, vol.24, pp.636-679, 1935.

A. Jitianu, M. Gartner, M. Zaharescu, D. Cristea, and E. Manea, Experiments for inorganic???organic hybrid sol???gel films for micro- and nano-photonics, Materials Science and Engineering: C, vol.23, issue.1-2, pp.301-306, 2003.
DOI : 10.1016/S0928-4931(02)00245-X

H. F. Lu, N. Doke, D. A. Loy, R. A. Assink, D. A. Lavan et al., Evaporation-Induced Self-Assembly of Hybrid Bridged Silsesquioxane Film and Particulate Mesophases with Integral Organic Functionality, Journal of the American Chemical Society, vol.122, issue.22, pp.5258-5261, 2000.
DOI : 10.1021/ja9935862

O. Dag, C. Yoshina-ishii, T. Asefa, M. J. Maclachlan, H. Grondey et al., Oriented Periodic Mesoporous Organosilica (PMO) Film with Organic Functionality Inside the Channel Walls, Advanced Functional Materials, vol.11, issue.3, pp.213-217, 2001.
DOI : 10.1002/1616-3028(200106)11:3<213::AID-ADFM213>3.0.CO;2-C

R. H. Baney, M. Itoh, A. Sakakibara, and T. Suzuki, Silsesquioxanes, Chemical Reviews, vol.95, issue.5, pp.1409-1430, 1995.
DOI : 10.1021/cr00037a012

S. Yang, P. A. Mirau, C. Pai, O. Nalamsu, E. Reichmanis et al., Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers, Chemistry of Materials, vol.14, issue.1, pp.369-374, 2002.
DOI : 10.1021/cm010690l

B. Lee, Y. Park, Y. Hwang, W. Oh, J. Yoon et al., Ultralow-k nanoporous organosilicate dielectric films imprinted with dendritic spheres, Nature Materials, vol.28, issue.2, pp.147-151, 2005.
DOI : 10.1021/ma0002186

J. C. Brinker and G. W. Scherer, The Physics and Chemistry of Sol-Gel Processing, Sol-Gel Science, 1990.

M. C. Bautista and A. Morales, Silica antireflective films on glass produced by the sol???gel method, Solar Energy Materials and Solar Cells, vol.80, issue.2, pp.217-225, 2003.
DOI : 10.1016/j.solmat.2003.06.004

S. Yu, T. K. Wong, K. Pita, X. Hu, and V. Ligatchev, Surface modified silica mesoporous films as a low dielectric constant intermetal dielectric, Journal of Applied Physics, vol.92, issue.6, pp.3338-3344, 2002.
DOI : 10.1063/1.1499979

S. Yu, T. K. Wong, K. Pita, and X. Hu, Synthesis of organically modified mesoporous silica as a low dielectric constant intermetal dielectric, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol.20, issue.5, pp.2036-2042, 2002.
DOI : 10.1116/1.1506904

S. Serji, Y. Wu, M. Forbess, S. J. Limmer, T. Chou et al., Sol-Gel-Derived Mesoporous Silica Films with Low Dielectric Constants, Advanced Materials, vol.12, issue.22, pp.1695-1698, 2000.
DOI : 10.1002/1521-4095(200011)12:22<1695::AID-ADMA1695>3.0.CO;2-V

K. Makita, Y. Akamatsu, A. Takamatsu, S. Yamazaki, and Y. Abe, Sol-gel preparation of silica films with controlled surface morphology and their application to a low reflective glass, Journal of Sol-Gel Science and Technology, vol.14, issue.2, pp.175-186, 1999.
DOI : 10.1023/A:1008738117124

Y. Xu, Y. Tsai, K. N. Tu, B. Zhao, Q. Liu et al., Dielectric property and microstructure of a porous polymer material with ultralow dielectric constant, Applied Physics Letters, vol.75, issue.6, pp.853-855, 1999.
DOI : 10.1063/1.124535

J. H. Harreld, T. Ebina, N. Tsubo, and G. Stucky, Manipulation of pore size distributions in silica and ormosil gels dried under ambient pressure conditions, Journal of Non-Crystalline Solids, vol.298, issue.2-3, pp.241-251, 2002.
DOI : 10.1016/S0022-3093(01)01051-1

G. Cao and H. Tian, Synthesis of highly porous organic-inorganic hybrids by ambient pressure sol-gel processing, Journal of Sol-Gel Science and Technology, vol.13, issue.1/3, pp.305-309, 1998.
DOI : 10.1023/A:1008616025269

L. W. Hrubesh and J. F. Poco, Thin aerogel films for optical, thermal, acoustic and electronic applications, Journal of Non-Crystalline Solids, vol.188, issue.1-2, pp.46-53, 1995.
DOI : 10.1016/0022-3093(95)00028-3

T. Rajagopalan, B. Lahlouh, J. A. Lubguban, N. Biswas, S. Gangopadhyay et al., Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films, Applied Physics Letters, vol.82, issue.24, pp.4328-4330, 2003.
DOI : 10.1063/1.1583139

Y. Wei, D. Jin, T. Ding, W. Shih, X. Liu et al., A non-surfactant templating route to mesoporous silica materials, Adv. Mater, vol.3, issue.4, pp.313-316, 1998.

S. Yang, P. A. Mirau, C. Pai, O. Nalamasu, E. Riechmanis et al., Molecular Templating of Nanoporous Ultralow Dielectric Constant (???1.5) Organosilicates by Tailoring the Microphase Separation of Triblock Copolymers, Chemistry of Materials, vol.13, issue.9, pp.2762-2764, 2001.
DOI : 10.1021/cm0102786

P. J. Bruinsma, N. J. Hess, J. R. Bontha, J. Liu, and S. Baskaran, Low K Mesoporous Silica Films Through Template-Based Processing, MRS Proceedings, vol.381, pp.105-110, 1997.
DOI : 10.1038/381589a0

S. Baskaran, J. Liu, K. Domansky, N. Kohler, X. Li et al., Low Dielectric Constant Mesoporous Silica Films Through Molecularly Templated Synthesis, Advanced Materials, vol.12, issue.4, pp.291-294, 2000.
DOI : 10.1002/(SICI)1521-4095(200002)12:4<291::AID-ADMA291>3.0.CO;2-P

T. Clark, J. D. Ruiz, H. Fan, C. J. Brinker, B. I. Swanson et al., A New Application of UV???Ozone Treatment in the Preparation of Substrate-Supported, Mesoporous Thin Films, Chemistry of Materials, vol.12, issue.12, pp.3879-3884, 2000.
DOI : 10.1021/cm000456f

S. Li, Z. Li, and Y. Yan, Ultra-Low-k Pure-Silica Zeolite MFI Films Using Cyclodextrin as Porogen, Advanced Materials, vol.15, issue.18, pp.1528-1531, 2003.
DOI : 10.1002/adma.200305173

C. J. Hawker, J. L. Hedrick, R. D. Miller, and W. Volksen, Supramolecular Approaches to Nanoscale Dielectric Foams for Advanced Microelectronic Devices, MRS Bulletin, vol.77, issue.04, pp.54-58, 2000.
DOI : 10.1557/mrs2000.30

C. V. Nguyen, K. R. Carter, C. J. Hawker, J. L. Hedrick, R. L. Jaffe et al., Low-Dielectric, Nanoporous Organosilicate Films Prepared via Inorganic/Organic Polymer Hybrid Templates, Chemistry of Materials, vol.11, issue.11, pp.3080-3085, 1999.
DOI : 10.1021/cm990114d

J. L. Hedrick, C. J. Hawker, R. D. Miller, R. Twieg, S. A. Srinivasan et al., Structure Control in Organic???Inorganic Hybrids Using Hyperbranched High-Temperature Polymers, Macromolecules, vol.30, issue.24, pp.7606-7610, 1997.
DOI : 10.1021/ma970797n

S. Yu, T. K. Wong, X. Hu, and K. Pita, Structural and dielectric properties of mesoporous silsesquioxane films, Chemical Physics Letters, vol.384, issue.1-3, pp.63-67, 2004.
DOI : 10.1016/j.cplett.2003.12.004

J. Zheng, J. Pang, K. Qiu, and Y. Wei, Synthesis of mesoporous silica materials with hydroxyacetic acid derivatives as templates via a sol-gel process, Journal of Inorganic and Organometallic Polymers, vol.10, issue.3, pp.103-113, 2000.
DOI : 10.1023/A:1009428010719

J. Yim, M. R. Baklanov, D. W. Gidley, H. Peng, H. Jeong et al., Pore Structure of Modified Cyclic Silsesquioxane Thin Films Made Porous Using a Cyclodextrins-Based Porogen, The Journal of Physical Chemistry B, vol.108, issue.26, pp.8953-8959, 2004.
DOI : 10.1021/jp049738j

A. T. Kohl, R. Mimna, R. Shick, L. Rhodes, Z. L. Wang et al., Low k, Porous Methyl Silsesquioxane and Spin-On-Glass, Electrochemical and Solid-State Letters, vol.2, issue.2, pp.77-79, 1999.
DOI : 10.1149/1.1390740

Q. Huo, D. I. Margolese, and G. D. Stucky, Surfactant Control of Phases in the Synthesis of Mesoporous Silica-Based Materials, Chemistry of Materials, vol.8, issue.5, pp.1147-1160, 1996.
DOI : 10.1021/cm960137h

Q. Huo, D. I. Margolese, U. Ciesla, P. Feng, T. E. Gier et al., Generalized synthesis of periodic surfactant/inorganic composite materials, Nature, vol.368, issue.6469, pp.317-321, 1994.
DOI : 10.1038/368317a0

P. T. Tanev and T. J. Pinnavaia, A Neutral Templating Route to Mesoporous Molecular Sieves, Science, vol.267, issue.5199, p.865, 1995.
DOI : 10.1126/science.267.5199.865

D. Zhao, Q. Huo, J. Feng, B. F. Chmelka, and G. D. Stucky, Nonionic Triblock and Star Diblock Copolymer and Oligomeric Surfactant Syntheses of Highly Ordered, Hydrothermally Stable, Mesoporous Silica Structures, Journal of the American Chemical Society, vol.120, issue.24, pp.6024-6036, 1998.
DOI : 10.1021/ja974025i

C. T. Kresge, M. E. Leonowicz, W. J. Roth, J. C. Vartuli, and J. S. Beck, Ordered mesoporous molecular sieves synthesized by a liquid-crystal template mechanism, Nature, vol.359, issue.6397, pp.710-712, 1992.
DOI : 10.1038/359710a0

J. S. Beck, J. C. Vartuli, W. J. Roth, M. E. Leonowicz, C. T. Kresge et al., A new family of mesoporous molecular sieves prepared with liquid crystal templates, Journal of the American Chemical Society, vol.114, issue.27, pp.10834-10843, 1992.
DOI : 10.1021/ja00053a020

M. Ogawa, Formation of Novel Oriented Transparent Films of Layered Silica-Surfactant Nanocomposites, Journal of the American Chemical Society, vol.116, issue.17, pp.7941-7942, 1994.
DOI : 10.1021/ja00096a079

H. Yang, A. Kuperman, N. Coombs, S. Mamiche-afara, and G. Ozin, Synthesis of oriented films of mesoporous silica on mica, Nature, vol.379, issue.6567, pp.703-705, 1996.
DOI : 10.1038/379703a0

I. Aksay, M. Trau, S. Manne, I. Honma, N. Yao et al., Biomimetic Pathways for Assembling Inorganic Thin Films, Science, vol.273, issue.5277, pp.892-898, 1996.
DOI : 10.1126/science.273.5277.892

M. Ogawa, A simple sol???gel route for the preparation of silica???surfactant mesostructured materials, Chem. Commun., vol.16, issue.10, pp.1149-1150, 1996.
DOI : 10.1039/CC9960001149

J. N. Israelachvili, D. J. Mitchell, and B. W. Ninham, Theory of self-assembly of hydrocarbon amphiphiles into micelles and bilayers, Journal of the Chemical Society, Faraday Transactions 2, vol.72, pp.1525-1568, 1976.
DOI : 10.1039/f29767201525

K. Borisch, S. Diele, P. Göring, H. Kresse, and C. Tschierske, Tailoring thermotropic cubic mesophases: amphiphilic polyhydroxy derivatives, Journal of Materials Chemistry, vol.8, issue.3, pp.529-543, 1998.
DOI : 10.1039/a705359b

A. R. Balkenende, F. K. De-theije, and J. C. Kriege, Controlling Dielectric and Optical Properties of Ordered Mesoporous Organosilicate Films, Advanced Materials, vol.6, issue.2, pp.139-143, 2003.
DOI : 10.1002/adma.200390028

S. Besson, Films organisés de silice mésoporeuse : synthèse, caractérisation structurale et utilisation pour la croissance de nanoparticules, Thèse de Doctorat de l'Ecole Polytechnique, 2002.

D. Zhao, J. Feng, Q. Huo, N. Melosh, G. H. Fredrickson et al., Triblock Copolymer Syntheses of Mesoporous Silica with Periodic 50&nbsp;to 300&nbsp;Angstrom Pores, Science, vol.279, issue.5350, pp.548-552, 1998.
DOI : 10.1126/science.279.5350.548

E. L. Crepaldi, G. J. De, A. A. Soler-illia, D. Grosso, P. Albouy et al., Design and post-functionalization of ordered mesoporous zirconia thin films, Chem. Commun, vol.17, pp.1582-1583, 2001.

S. Baskaran, J. Liu, K. Domansky, N. Kohler, X. Li et al., Low Dielectric Constant Mesoporous Silica Films Through Molecularly Templated Synthesis, Advanced Materials, vol.12, issue.4, pp.291-294, 2000.
DOI : 10.1002/(SICI)1521-4095(200002)12:4<291::AID-ADMA291>3.0.CO;2-P

L. W. Kelts and N. J. Armstrong, A silicon-29 NMR study of the structural intermediates in low pH sol-gel reactions, Journal of Materials Research, vol.4, issue.02, pp.423-433, 1989.
DOI : 10.1557/JMR.1989.0423

P. Innocenzi, P. Falcaro, D. Grosso, and F. Babonneau, Order???Disorder Transitions and Evolution of Silica Structure in Self-Assembled Mesostructured Silica Films Studied through FTIR Spectroscopy, The Journal of Physical Chemistry B, vol.107, issue.20, pp.4711-4717, 2003.
DOI : 10.1021/jp026609z

P. Falcaro, D. Grosso, H. Amenitsch, and P. Innocenzi, Silica Orthorhombic Mesostructured Films with Low Refractive Index and High Thermal Stability, The Journal of Physical Chemistry B, vol.108, issue.30, pp.10942-10948, 2004.
DOI : 10.1021/jp037740p

S. Inoue, Y. Hanzawa, and K. Kaneko, on Regular Mesoporous Silica, Langmuir, vol.14, issue.11, pp.3079-3081, 1998.
DOI : 10.1021/la971256u

P. L. Llewellyn, Y. Grillet, F. Schüth, H. Reichert, and K. K. Unger, Effect of pore size on adsorbate condensation and hysteresis within a potential model adsorbent: M41S, Microporous Materials, vol.3, issue.3, pp.345-349, 1994.
DOI : 10.1016/0927-6513(94)00042-5

A. Bourgeois, A. Brunet-bruneau, S. Fisson, B. Demarets, D. Grosso et al., Determination of pore size distribution in thin organized mesoporous silica films by spectroscopic ellipsometry in the visible and infrared range, Thin Solid Films, pp.447-448, 2004.
URL : https://hal.archives-ouvertes.fr/hal-00004939

A. Ayral, A. E. Mansouri, M. Vieira, and C. Pilon, Porosity of sol-gel derived silica coatings on glass substrates, J. Mater. Sci. Lett, vol.17, pp.883-885, 1998.

B. D. Vogt, R. A. Pai, H. Lee, R. C. Hedden, C. L. Soles et al., Characterization of Ordered Mesoporous Silica Films Using Small-Angle Neutron Scattering and X-ray Porosimetry, Chemistry of Materials, vol.17, issue.6, pp.1398-1408, 2005.
DOI : 10.1021/cm048654k

J. Berquier, P. Nael, J. Jupille, and C. Jacquiod, Infrared evidence for Hofmann reaction during calcination of surfactant-templated silica films and analysis of the resulting surface sites, Journal of Sol-Gel Science and Technology, vol.19, issue.1/3, pp.83-87, 2000.
DOI : 10.1023/A:1008766322651

S. Yu, T. K. Wong, K. Pita, X. Hu, and V. Ligatchev, Surface modified silica mesoporous films as a low dielectric constant intermetal dielectric, Journal of Applied Physics, vol.92, issue.6, pp.3338-3344, 2002.
DOI : 10.1063/1.1499979

M. H. Lim, C. F. Blanford, and A. Stein, Synthesis of Ordered Microporous Silicates with Organosulfur Surface Groups and Their Applications as Solid Acid Catalysts, Chemistry of Materials, vol.10, issue.2, pp.467-470, 1998.
DOI : 10.1021/cm970713p

M. Etienne, B. Lebau, and A. Walcarius, Organically-modified mesoporous silica spheres with MCM-41 architecture, New Journal of Chemistry, vol.26, issue.4, pp.384-386, 2002.
DOI : 10.1039/b110741k

H. Fan, Y. Lu, A. Stump, S. T. Reed, T. Baer et al., Rapid prototyping of patterned functional nanostructures, Nature, vol.405, issue.6782, pp.56-60, 2000.
DOI : 10.1038/35011026

L. Nicole, C. Boissière, D. Grosso, P. Hesemann, J. Moreau et al., Advanced selective optical sensors based on periodically organized mesoporous hybrid silica thin films, Chem. Commun., vol.28, issue.20, pp.2312-2313, 2004.
DOI : 10.1039/B408869G

R. Anwander, I. Nagl, M. Widenmeyer, G. Engelhardt, O. Groeger et al., Surface Characterization and Functionalization of MCM-41 Silicas via Silazane Silylation, The Journal of Physical Chemistry B, vol.104, issue.15
DOI : 10.1021/jp993108d

H. Yang, G. Zhang, X. Hong, and Y. Zhu, Silylation of mesoporous silica MCM-41 with the mixture of Cl(CH2)3SiCl3 and CH3SiCl3: combination of adjustable grafting density and improved hydrothermal stability, Microporous and Mesoporous Materials, vol.68, issue.1-3, pp.119-125, 2004.
DOI : 10.1016/j.micromeso.2003.12.014

B. Lindlar, M. Lüchinger, A. Röthlisberger, M. Haouas, G. Pirngruber et al., Chemical modification of high-quality large-pore M41S materials, Journal of Materials Chemistry, vol.12, issue.3, pp.528-533, 2002.
DOI : 10.1039/b109205g

A. Stein, B. J. Melde, and R. C. Schroden, Hybrid Inorganic-Organic Mesoporous Silicates???Nanoscopic Reactors Coming of Age, Advanced Materials, vol.12, issue.19, pp.1403-1419, 2000.
DOI : 10.1002/1521-4095(200010)12:19<1403::AID-ADMA1403>3.0.CO;2-X

A. Sayari and S. Hamoudi, Periodic Mesoporous Silica-Based Organic???Inorganic Nanocomposite Materials, Chemistry of Materials, vol.13, issue.10, pp.3151-3168, 2001.
DOI : 10.1021/cm011039l

X. Feng, G. E. Fryxell, L. Wang, A. Y. Kim, J. Liu et al., Functionalized Monolayers on Ordered Mesoporous Supports, Science, vol.276, issue.5314, pp.923-926, 1997.
DOI : 10.1126/science.276.5314.923

V. Antochshuk and M. Jaroniec, Simultaneous modification of mesopores and extraction of template molecules from MCM-41 with trialkylchlorosilanes, Chemical Communications, vol.23, issue.23, pp.2373-2374, 1999.
DOI : 10.1039/a905242i

S. Baskaran, J. Liu, K. Domansky, N. Kohler, X. Li et al., Low Dielectric Constant Mesoporous Silica Films Through Molecularly Templated Synthesis, Advanced Materials, vol.12, issue.4, pp.291-294, 2000.
DOI : 10.1002/(SICI)1521-4095(200002)12:4<291::AID-ADMA291>3.0.CO;2-P

H. Fan, H. R. Bentley, K. R. Kathan, P. Clem, Y. Lu et al., Self-assembled aerogel-like low dielectric constant films, Journal of Non-Crystalline Solids, vol.285, issue.1-3, pp.79-83, 2001.
DOI : 10.1016/S0022-3093(01)00435-5

C. Jacquiod, J. Berquier, L. Teyssedre, and M. , Azzopardi Glazing with a functional, especially hydrophobic, mesoporous coating, Patent no US, p.1, 2002.

N. Petkov, S. Mintova, B. Jean, T. Metzger, and T. Bein, Functionalized cubic mesostructured silica films, Materials Science and Engineering: C, vol.23, issue.6-8, pp.6-8, 2003.
DOI : 10.1016/j.msec.2003.09.134

S. Yang, Y. Horibe, C. Chen, P. Mirau, T. Tatry et al., Ordered Hydrophobic Organosilicates Templated by Block Copolymers, Chemistry of Materials, vol.14, issue.12, pp.5173-5178, 2002.
DOI : 10.1021/cm0207503

K. Yu, B. Smarsly, and C. J. Brinker, Self-Assembly and Characterization of Mesostructured Silica Films with a 3D Arrangement of Isolated Spherical Mesopores, Advanced Functional Materials, vol.13, issue.1, pp.47-52, 2003.
DOI : 10.1002/adfm.200390005

B. Smarsly, G. Xomeritakis, K. Yu, N. Liu, H. Fan et al., -poly(ethylene oxide)-Templated Silica Films with Cubic-Ordered Spherical Mesopores, Langmuir, vol.19, issue.18, pp.7295-7301, 2003.
DOI : 10.1021/la034798m

URL : https://hal.archives-ouvertes.fr/hal-01021197

O. Dag, C. Yoshina-ishii, T. Asefa, M. J. Maclachlan, H. Grondey et al., Oriented Periodic Mesoporous Organosilica (PMO) Film with Organic Functionality Inside the Channel Walls, Advanced Functional Materials, vol.11, issue.3, pp.213-217, 2001.
DOI : 10.1002/1616-3028(200106)11:3<213::AID-ADFM213>3.0.CO;2-C

Y. Lu, H. Fan, N. Doke, D. A. Loy, R. A. Assink et al., Evaporation-Induced Self-Assembly of Hybrid Bridged Silsesquioxane Film and Particulate Mesophases with Integral Organic Functionality, Journal of the American Chemical Society, vol.122, issue.22, pp.5258-5261, 2000.
DOI : 10.1021/ja9935862

L. Nicole, C. Boissière, D. Grosso, A. Quach, and C. Sanchez, Mesostructured hybrid organic???inorganic thin films, Journal of Materials Chemistry, vol.42, issue.45, pp.3598-3627, 2005.
DOI : 10.1039/b506072a

URL : https://hal.archives-ouvertes.fr/hal-00022641

A. R. Balkenende, F. K. De-theije, and J. C. Kriege, Controlling Dielectric and Optical Properties of Ordered Mesoporous Organosilicate Films, Advanced Materials, vol.6, issue.2, pp.139-143, 2003.
DOI : 10.1002/adma.200390028

F. K. De-theije, A. R. Balkenende, M. A. Verheijen, M. R. Baklanov, K. P. Mogilnikov et al., Dielectrics, The Journal of Physical Chemistry B, vol.107, issue.18, pp.4280-4289, 2003.
DOI : 10.1021/jp027701y

F. Cagnol, D. Grosso, and C. Sanchez, A general one-pot process leading to highly functionalized ordered mesoporous silica films, Chem. Commun, vol.15, pp.1742-1743, 2004.

N. Liu, R. A. Assink, and C. J. Brinker, Synthesis and characterization of highly ordered mesoporous thin films with ???COOH terminated pore surfaces, Chemical Communications, vol.3, issue.3, pp.370-371, 2003.
DOI : 10.1039/b210377j

A. Gibaud, J. Bardeau, M. Dutreilh-colas, M. Bellour, V. V. Balasubramanian et al., Influence of functional organic groups on the structure of CTAB templated organosilica thin films, J. Mater. Chem., vol.107, issue.12, pp.1854-1860, 2004.
DOI : 10.1039/B401869A

J. Jung, J. Y. Bae, and B. Bae, Characterization and mesostructure control of mesoporous fluorinated organosilicate films, Journal of Materials Chemistry, vol.14, issue.13, pp.1988-1994, 2004.
DOI : 10.1039/b401774a

B. Alonso, A. R. Balkenende, P. Albouy, H. Amenitsch, M. Rager et al., Hybrid 3D ordered mesoporous thin films made from organosiloxane precursors, Journal of Sol-Gel Science and Technology, vol.26, issue.1/3, pp.587-591, 2003.
DOI : 10.1023/A:1020776121896

S. Tanaka, J. Kaihara, N. Nishiyama, Y. Oku, Y. Egashira et al., Incorporation of Organic Groups within the Channel Wall of Spin-On Mesostructured Silica Films by a Vapor Infiltration Technique, Langmuir, vol.20, issue.9, pp.3780-3784, 2004.
DOI : 10.1021/la036453+

C. Yang, A. Cho, F. Pan, T. Tsai, and K. J. Chao, Spin-on Mesoporous Silica Films with Ultralow Dielectric Constants, Ordered Pore Structures, and Hydrophobic Surfaces, Advanced Materials, vol.13, issue.14, pp.1099-1102, 2001.
DOI : 10.1002/1521-4095(200107)13:14<1099::AID-ADMA1099>3.0.CO;2-0

E. M. Wong, M. A. Markowitz, S. B. Qadri, S. L. Golledge, D. G. Castner et al., Preparation of Quaternary Ammonium Organosilane Functionalized Mesoporous Thin Films, Langmuir, vol.18, issue.4, pp.972-974, 2002.
DOI : 10.1021/la015623k

M. H. Lim and A. Stein, Comparative Studies of Grafting and Direct Syntheses of Inorganic???Organic Hybrid Mesoporous Materials, Chemistry of Materials, vol.11, issue.11, pp.3285-3295, 1999.
DOI : 10.1021/cm990369r

T. Yokoi, H. Yoshitake, and T. Tatsumi, Synthesis of amino-functionalized MCM-41 via direct co-condensation and post-synthesis grafting methods using mono-, di- and tri-amino-organoalkoxysilanesElectronic supplementary information (ESI) available: XRD patterns of (A) x-dNN-MCM-41 and (B) x-dNNN-MCM-41 after the extraction of the surfactant, 29Si MAS NMR spectra of MCM-41 samples prepared by (A) direct co-condensation and (B) post-synthesis grafting methods. See http://www.rsc.org/suppdata/jm/b3/b310576h/, Journal of Materials Chemistry, vol.14, issue.6, pp.951-957, 2004.
DOI : 10.1039/b310576h

L. Malier, F. Devreux, F. Chaput, and J. Boilot, Chemical processing of advanced materials . Chap. 6 : Silicon-29 nuclear magnetic resonance of sol-gel transformation in first steps and after gel time, 1992.

F. Devreux, J. Boilot, F. Chaput, and A. Lecomte, NMR and small-angle x-ray scattering study, Physical Review A, vol.41, issue.12, pp.6901-6909, 1990.
DOI : 10.1103/PhysRevA.41.6901

M. J. Van-bommel, T. N. Bernards, and A. H. Boonstra, The influence of the addition of alkyl-substituted ethoxysilane on the hydrolysis???condensation process of TEOS, Journal of Non-Crystalline Solids, vol.128, issue.3, pp.231-242, 1991.
DOI : 10.1016/0022-3093(91)90461-E

P. Falcaro, S. Costacurta, G. Mattei, H. Amenitsch, A. Marcelli et al., Highly Ordered ???Defect-Free??? Self-Assembled Hybrid Films with a Tetragonal Mesostructure, Journal of the American Chemical Society, vol.127, issue.11, pp.3838-3846, 2005.
DOI : 10.1021/ja0427956

P. Innocenzi, L. Malfatti, T. Kidchob, P. Falcaro, M. C. Guidi et al., Kinetics of polycondensation reactions during self-assembly of mesostructured films studied by in situ infrared spectroscopy, Chemical Communications, vol.125, issue.18, pp.2384-2386, 2005.
DOI : 10.1039/b418381a

G. Wanka, H. Hoffmann, and W. Ulbricht, Phase Diagrams and Aggregation Behavior of Poly(oxyethylene)-Poly(oxypropylene)-Poly(oxyethylene) Triblock Copolymers in Aqueous Solutions, Macromolecules, vol.27, issue.15, pp.4145-4159, 1994.
DOI : 10.1021/ma00093a016

J. C. Brinker and G. W. Scherer, The Physics and Chemistry of Sol-Gel Processing, Sol-Gel Science, 1990.

S. Besson, T. Gacoin, C. Ricolleau, C. Jacquiod, and J. Boilot, Phase diagram for mesoporous CTAB???silica films prepared under dynamic conditions, Journal of Materials Chemistry, vol.13, issue.2, pp.404-409, 2003.
DOI : 10.1039/b206698j

S. Besson, Films organisés de silice mésoporeuse : synthèse, caractérisation structurale et utilisation pour la croissance de nanoparticules, Thèse de Doctorat de l'Ecole Polytechnique, 2002.

D. Zhao, Q. Huo, J. Feng, B. F. Chmelka, and G. D. Stucky, Nonionic Triblock and Star Diblock Copolymer and Oligomeric Surfactant Syntheses of Highly Ordered, Hydrothermally Stable, Mesoporous Silica Structures, Journal of the American Chemical Society, vol.120, issue.24, pp.6024-6036, 1998.
DOI : 10.1021/ja974025i

J. Berquier, P. Nael, J. Jupille, and C. Jacquiod, Infrared evidence for Hofmann reaction during calcination of surfactant-templated silica films and analysis of the resulting surface sites, Journal of Sol-Gel Science and Technology, vol.19, issue.1/3, pp.83-87, 2000.
DOI : 10.1023/A:1008766322651

H. Fan, S. Reed, T. Baer, R. Schunk, G. P. Lopez et al., Hierarchically structured functional porous silica and composite produced by evaporation-induced selfassembly, Microp. Mesop. Mater, pp.44-45, 2001.

D. J. Mitchell, G. J. Tiddy, L. Waring, T. Bostock, and M. P. Mcdonald, Phase behaviour of polyoxyethylene surfactants with water. Mesophase structures and partial miscibility (cloud points), Journal of the Chemical Society, Faraday Transactions 1: Physical Chemistry in Condensed Phases, vol.79, issue.4, pp.975-1000, 1983.
DOI : 10.1039/f19837900975

S. Yu, T. K. Wong, K. Pita, and X. Hu, Synthesis of organically modified mesoporous silica as a low dielectric constant intermetal dielectric, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol.20, issue.5, pp.2036-2042, 2002.
DOI : 10.1116/1.1506904

C. Yang, A. Cho, F. Pan, T. Tsai, and K. J. Chao, Spin-on Mesoporous Silica Films with Ultralow Dielectric Constants, Ordered Pore Structures, and Hydrophobic Surfaces, Advanced Materials, vol.13, issue.14, pp.1099-1102, 2001.
DOI : 10.1002/1521-4095(200107)13:14<1099::AID-ADMA1099>3.0.CO;2-0

M. C. Bautista and A. Morales, Silica antireflective films on glass produced by the sol???gel method, Solar Energy Materials and Solar Cells, vol.80, issue.2, pp.217-225, 2003.
DOI : 10.1016/j.solmat.2003.06.004

D. Chen, Anti-reflection (AR) coatings made by sol???gel processes: A review, Solar Energy Materials and Solar Cells, vol.68, issue.3-4, pp.313-336, 2001.
DOI : 10.1016/S0927-0248(00)00365-2

X. Li, J. C. Birnbaum, R. E. Williford, G. E. Fryxell, C. A. Coyle et al., Effect of humidity treatments on porosity and mechanical integrity of mesoporous silica films, Chemical Communications, issue.16, pp.2054-2055, 2003.
DOI : 10.1039/b304843h

S. B. Jung, C. Han, and H. Park, Electrical and mechanical properties of surfactant-templated mesoporous silica thin films using Brij-76 surfactant, Applied Surface Science, vol.244, issue.1-4, pp.47-50, 2005.
DOI : 10.1016/j.apsusc.2004.09.127

S. Baskaran, J. Liu, K. Domansky, N. Kohler, X. Li et al., Low Dielectric Constant Mesoporous Silica Films Through Molecularly Templated Synthesis, Advanced Materials, vol.12, issue.4, pp.291-294, 2000.
DOI : 10.1002/(SICI)1521-4095(200002)12:4<291::AID-ADMA291>3.0.CO;2-P

E. Craven, S. Besson, M. Klotz, T. Gacoin, J. Boilot et al., How can nanoparticles change the mechanical resistance of ordered mesoporous thin films ?, Studies Surf. Sci. Catal, vol.146, pp.535-538, 2003.
DOI : 10.1016/S0167-2991(03)80439-1

H. Fan, H. R. Bentley, K. R. Kathan, P. Clem, Y. Lu et al., Self-assembled aerogel-like low dielectric constant films, Journal of Non-Crystalline Solids, vol.285, issue.1-3, pp.79-83, 2001.
DOI : 10.1016/S0022-3093(01)00435-5

R. E. Williford, X. S. Li, R. S. Addleman, G. E. Fryxell, S. Baskaran et al., Mechanical stability of templated mesoporous silica thin films, Microporous and Mesoporous Materials, vol.85, issue.3, pp.260-266, 2005.
DOI : 10.1016/j.micromeso.2005.06.024

M. R. Baklanov, K. P. Mogilnikov, K. Maex, D. Shamiryan, and F. N. Dultsev, Method and apparatus for characterization of porous films, 2003.

C. Murray, C. Flannery, I. Streiter, S. E. Schulz, M. R. Baklanov et al., Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-k SiO2 xerogel films, Microelectronic Engineering, vol.60, issue.1-2, pp.133-141, 2002.
DOI : 10.1016/S0167-9317(01)00589-5

D. Desplantier-giscard, A. Galarneau, F. D. Renzo, and F. Fajula, Mechanical strength of nanosized hexagonal silica honeycombs, Materials Science and Engineering: C, vol.23, issue.6-8, pp.727-732, 2003.
DOI : 10.1016/j.msec.2003.09.115

A. Galarneau, D. Desplantier-giscard, F. D. Renzo, and F. Fajula, Thermal and mechanical stability of micelle-templated silica supports for catalysis, Catalysis Today, vol.68, issue.1-3, pp.191-200, 2001.
DOI : 10.1016/S0920-5861(01)00300-5

M. Matheron, T. Gacoin, J. Boilot, A. Bourgeois, A. Brunet-bruneau et al., Ordered mesoporous organosilica films, Surf. Sci. Catal, vol.156, pp.327-334, 2005.
DOI : 10.1016/S0167-2991(05)80225-3

A. Bourgeois, A. Brunet-bruneau, S. Fisson, J. Rivory, M. Matheron et al., Adsorption and Desorption Isotherms at Ambient Temperature Obtained by Ellipsometric Porosimetry to Probe Micropores in Ordered Mesoporous Silica Films, Adsorption, vol.279, issue.448, pp.195-199, 2005.
DOI : 10.1007/s10450-005-5922-7

J. Boilot, T. Gacoin, K. Lahlil, V. Buissette, D. Giaume et al., Actualité Chimique octobre-novembre Communications orales "Ordered mesoporous organosilicate films : post-synthesis grafting vs, pp.290-291, 2005.

M. Matheron, T. Gacoin, J. Boilot, A. Bourgeois, A. Brunet-bruneau et al., Ordered mesoporous organosilicate films : post-synthesis grafting vs, Spring Meeting, 2005.
DOI : 10.1016/j.tsf.2005.08.262

M. Matheron, T. Gacoin, J. Boilot, A. Bourgeois, A. Brunet-bruneau et al., Communication par afficheAdsorption and desorption isotherms at ambient temperature to probe microporosity in ordered mesoporous silica films, Albouy Nano-IV, 2005.

S. Besson, T. Gacoin, C. Ricolleau, C. Jacquiod, and J. , Phase diagram for mesoporous CTAB???silica films prepared under dynamic conditions, Journal of Materials Chemistry, vol.13, issue.2, pp.404-409, 2003.
DOI : 10.1039/b206698j

S. Besson, T. Gacoin, C. Jacquiod, C. Ricolleau, D. Babonneau et al., Structural study of 3D-hexagonal mesoporous spin-coated sol???gel films, Journal of Materials Chemistry, vol.10, issue.6, pp.1331-1336, 2000.
DOI : 10.1039/a908845h

S. Besson, C. Ricolleau, T. Gacoin, C. Jacquiod, and J. , A New 3D Organization of Mesopores in Oriented CTAB Silica Films, The Journal of Physical Chemistry B, vol.104, issue.51, pp.12095-12097, 2000.
DOI : 10.1021/jp0026538

D. Grosso, A. R. Balkenende, P. Albouy, M. Lavergne, L. Mazerolles et al., Highly oriented 3D-hexagonal silica thin films produced with cetyltrimethylammonium bromide, Journal of Materials Chemistry, vol.10, issue.9, pp.2085-2089, 2000.
DOI : 10.1039/b003178j

S. Besson, Films organisés de silice mésoporeuse : synthèse, caractérisation structurale et utilisation pour la croissance de nanoparticules, 2000.

B. La-figure, 2 montre le dispositif expérimental de mesure Il s'agit d'un ellipsomètre spectroscopique à modulation de phase (UVISEL, de marque Jobin-Yvon) Les mesures sont effectuées dans le visible et le proche UV (entre 1, sous une incidence de 70°

C. Annexe and . Caractérisation-de-la-morphologie-poreuse, Une caractérisation rigoureuse de la porosité des films nécessite la combinaison de deux techniques : l'ellipsométrie infrarouge et la porosimétrie ellipsométrique. La première permet de déterminer l'indice du squelette de silice et la porosité totale des films, tandis que la seconde

A. Brunet-bruneau, S. Fisson, G. Vuye, and J. Rivory, Change of TO and LO mode frequency of evaporated SiO2 films during aging in air, Journal of Applied Physics, vol.87, issue.10, pp.7303-7309, 2000.
DOI : 10.1063/1.372984