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2 montre le dispositif expérimental de mesure Il s'agit d'un ellipsomètre spectroscopique à modulation de phase (UVISEL, de marque Jobin-Yvon) Les mesures sont effectuées dans le visible et le proche UV (entre 1, sous une incidence de 70° ,
Une caractérisation rigoureuse de la porosité des films nécessite la combinaison de deux techniques : l'ellipsométrie infrarouge et la porosimétrie ellipsométrique. La première permet de déterminer l'indice du squelette de silice et la porosité totale des films, tandis que la seconde ,
Change of TO and LO mode frequency of evaporated SiO2 films during aging in air, Journal of Applied Physics, vol.87, issue.10, pp.7303-7309, 2000. ,
DOI : 10.1063/1.372984