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Encapsulation de dispositifs sensibles à l'atmosphère par des dépôts couches minces élaborés par PECVD.

Abstract : Organic photovoltaic solar cells and lithium microbatteries are easily degraded in atmosphere. Indeed, these devices require encapsulation with a barrier material, which exhibits extremely low permeation rates for water vapour and oxygen. To obtain such a high barrier, we chose to direct our studies on lay! ers deposited by plasma-enhanced chemical vapour deposition (PECVD), and more particularly on amorphous materials like silicon oxide (SiOx) and silicon nitride (SiNx). In a first part, two new methods of barrier properties measurements were set up specially to characterize low transmission rates : the "lithium test" and a high sensitive permeameter. In a second part, studies of monolayer and multilayer systems were performed. A high-performance system is obtained with a multilayer based on a same material SiOx, where two consecutive layers are separated by a plasma treatment. This post-treatment allows creating interfaces. The study on the effect of the treatment allows understanding interfaces phenomena in a multilayer system and their influence on permeation. By these results, a model of gas molecules diffusion through a multilayer was proposed.
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https://pastel.archives-ouvertes.fr/pastel-00003495
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Submitted on : Friday, July 23, 2010 - 11:39:29 AM
Last modification on : Wednesday, November 29, 2017 - 3:02:26 PM
Long-term archiving on: : Monday, October 25, 2010 - 11:16:47 AM

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  • HAL Id : pastel-00003495, version 1

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Jennifer Ubrig. Encapsulation de dispositifs sensibles à l'atmosphère par des dépôts couches minces élaborés par PECVD.. Physique [physics]. Ecole Polytechnique X, 2007. Français. ⟨pastel-00003495⟩

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