Skip to Main content Skip to Navigation
Theses

Synthèse et contrôle de la taille de nanocristaux de silicium par plasma froid. Application dans les domaines de l'optoélectronique et de la nanoélectronique.

Abstract : In this thesis we have shown that one can synthesize silicon nanocrystals by using square- wave-modulated plasmas in silane-hydrogen gas mixtures. In our experimental conditions, by varying the growth time, we could control the size of silicon nanocrystals (from 4 nm to 12 nm). By measuring the size of the nanocrystals by transmission electron microscopy, we could calculate their radial growth rate. This later is proportional to the silane partial pressure in the gas mixture. By studying two types of plasmas, we have demonstrated the important role of atomic hydrogen for the obtaining of crystallized of nanoparticles. The precise control of size of the silicon nanocrystals has opened two fields of applications: (i) the fabrication of light emitting devices and (ii) the realisation of single electron transistors. For the first type of applications, a preliminary study has shown a blue shift of the photoluminescence peak when decreasing the size of silicon nanocrystals. It has been discussed on the basis of a quantum confinement effect combined with the passivation of the surface of the nanocrystals by a SiOx shell. We elaborated also light emission PIN diodes based on silicon nanocrystals. After the optimization of the PIN structure and of the deposition conditions of the intrinsic layer, we obtained an electroluminescence diode emitting in the range of infrared-visible at room temperature. For the second type of applications, we have studied the injection of charges in the silicon nanocrystals by AFM/KFM. Qualitative observations of injected charges were realized. Quantitative estimation of this charge as well as the effects of doping on the charge of the nanocristals deserves further studies.
Mots-clés : nanocristaux plasma froid
Complete list of metadatas

Cited literature [153 references]  Display  Hide  Download

https://pastel.archives-ouvertes.fr/pastel-00004159
Contributor : Ecole Polytechnique <>
Submitted on : Thursday, July 22, 2010 - 9:24:55 AM
Last modification on : Friday, October 23, 2020 - 4:37:18 PM
Long-term archiving on: : Monday, October 25, 2010 - 11:13:14 AM

Identifiers

  • HAL Id : pastel-00004159, version 1

Collections

Citation

Tran-Thuat Nguyen. Synthèse et contrôle de la taille de nanocristaux de silicium par plasma froid. Application dans les domaines de l'optoélectronique et de la nanoélectronique.. Mécanique des solides [physics.class-ph]. Ecole Polytechnique X, 2008. Français. ⟨pastel-00004159⟩

Share

Metrics

Record views

1070

Files downloads

1406