Polarimétrie de Mueller résolue en angle

Sami Ben Hatit

A new Mueller polarimeter based on liquid crystals and a microscope objective has been developed and is presented. Fast measurements of complete Mueller matrices over a range of polar angles (0-60°) and all azimuthal angles (0-360°) are achieved without mechanical movements. The polarization states generator and analyzer are based on nematic liquid crystals. The angular range is achieved through focalization of light over the measured sample with a microscope objective of high numerical aperture and imaging of the objective's back Fourier plane on a CCD array. A method for the calibration of the instrument, and particularly the precise characterization of the microscope objective, is shown and validated over well-known isotropic samples. The application of this device to the characterization of diffraction gratings in a conical diffraction mounting is presented, as well multiple other application perspectives such as overlay measurement, biological samples or plastic samples in transmission.

Keywords: Polarimetry; Mueller; Ellipsometry; Characterization; Diffraction gratings

Domains: Physics [physics]

Sami Ben Hatit. Polarimétrie de Mueller résolue en angle. Physics [physics]. Ecole Polytechnique X, 2009. English. ⟨NNT : ⟩. ⟨pastel-00004815⟩