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Elaboration de couches minces d'oxydes transparents et conducteurs par spray cvd assiste par radiation infrarouge pour applications photovoltaÏques

Abstract : Materials like metallic oxides are both properties of electrical conductivity and good transparency in the visible range. They are called "Transparent Conductive Oxides", TCO. Nowadays, the most used of this material is the indium oxide doped with tin (ITO). Indium is scarce and expensive since the huge fiat screen industries demand on ITO, his priee is thus increasing a lot. Research is looking for a challenger like tin oxide or zinc oxide which are promising materials. Different techniques can be used to deposit such materials in thin films. We chose the method called Spray-CVD because association of good quality deposition from CVD reaction and facility to handle precursors by spray is advantageous. Thus, this technique is simple and economic. The special feature of this deposition method is used infrared lamps as heating mode. Association of Spray-CVD technique and infrared heating is unique as far as we know. We called this entire system: IRASCVD (InfraRed Assisted Spray Chemical Vapour Deposition). Two strategies are developed to deposit competitive TCO thin films with our technique. The first one consists in building an experimental reactor of Spray-CVD in our laboratory. Fluorine doped and undoped tin oxide thin films have been studied and parameters of IRASCVD reactor have been optimized. These films have been used as transparent electrodes for organic solar cells. This allows us to validate the technique of TCO deposition. The second strategy consists in using a R&D reactor based on the same principle. We deposited aluminum doped and undoped zinc oxide in this reactor. We focused our work on infrared influence on thin films properties. A comparison with films deposited with classical heating such as hot plate has been done. This study highlights infrared impact on TCO thin films.
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https://pastel.archives-ouvertes.fr/pastel-00005629
Contributor : Ecole Arts Et Métiers Paristech <>
Submitted on : Friday, April 2, 2010 - 8:00:00 AM
Last modification on : Friday, July 17, 2020 - 2:58:25 PM
Long-term archiving on: : Thursday, September 30, 2010 - 9:12:48 PM

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  • HAL Id : pastel-00005629, version 1

Citation

Jérôme Garnier. Elaboration de couches minces d'oxydes transparents et conducteurs par spray cvd assiste par radiation infrarouge pour applications photovoltaÏques. Sciences de l'ingénieur [physics]. Arts et Métiers ParisTech, 2009. Français. ⟨NNT : 2009ENAM0030⟩. ⟨pastel-00005629⟩

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