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Contribution à l'étalonnage d'une machine à mesurer de très haute précision : mesure de rectitude et de planéité à un niveau d'incertitudes nanométriques

Abstract : The aim of this work is to investigate and focuse on the measurement of straightness under uncertainty about ± 10 nanometers over a length of 300mm with a constant step. This study also has been extended to include the flatness study. The flat used for this study was designed and calibrated to utilize as the vertical reference for a high accuracy coordinate machine, which is developed by the Laboratoire National de Métrologie et d'Essais. The instrumentation has been developed into two main parts. The first part is a square matrix of 16 capacitive sensors 20mm apart. Moreover, the second part is a pair of electronic levels. The data acquisitions were examined by a step equal to the distance between the sensors. The redundancy of the measures specifically designed to separate the error motions of the scanning stage, the form deviation of the element was calibrated and the unknowns corresponding to the information of the relative sensors positions. The proposed methodology represents a process known as propagation by using the assumption of small displacement which leads to solving an overdetermined linear system. The measurements units have two mains categories: the indications of sensors given in length units and the levels given in angle radian have the effect of weighting units. Therefore the resolution in the sense of weighted least squares has been introduced. In addition, the extreme solutions have been considered according to the uncertainties of the sensors are negligible or that of levels. This metrological study of measurement process is including the traceability with a laser interferometer. The Monte-Carlo method has been introduced for uncertainty model in this research. There are utilize two methods propose for an optimal weighting system. The results shown a reproducibility of 10 acquisitions contained in ± 5 nanometers range compared to the average measured profiles.
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Contributor : Siriwan Boripatkosol Connect in order to contact the contributor
Submitted on : Wednesday, October 20, 2010 - 11:55:12 AM
Last modification on : Wednesday, November 29, 2017 - 9:43:25 AM
Long-term archiving on: : Friday, January 21, 2011 - 2:40:19 AM


  • HAL Id : pastel-00527789, version 1



Siriwan Boripatkosol. Contribution à l'étalonnage d'une machine à mesurer de très haute précision : mesure de rectitude et de planéité à un niveau d'incertitudes nanométriques. Génie mécanique [physics.class-ph]. Arts et Métiers ParisTech, 2010. Français. ⟨NNT : 2010ENAM0032⟩. ⟨pastel-00527789⟩



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