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Etude et Traçabilité du calibrage " Line - Attenuator - Reflect", pour les mesures sous pointes à l'aide d'un analyseur de réseau vectoriel

Abstract : S-parameters are one of the base quantities of electricity-magnetism in the radiofrequency field. They are normalized to an impedance value called the reference impedance and measured using a vector network analyzer (Vector Network Analyzer (VNA)). The accuracy of S parameters measurements of microwave components depends on the accuracy of the calibration technique used to correct the systematic errors in the system. The calibration consists in measuring devices, called standards, and which can be accurately or partially known. The error parameters of the VNA are obtained from the calibration procedure and are finally used to characterize the true S-parameters of the device. The LAR (Line-Attenuator-Reflect) calibration procedure is particularly attractive because it is already integrated into modern VNAs and it enables broadband measurements with a limited number of standards. On the other hand, only a few studies concern the traceability assessment of this method. That is the reason why the LNE (Laboratoire National de Métrologie) decided to estimate the traceability and accuracy of S parameters measurement when the LAR calibration method is used. In this context, the thesis can be summarized as follows: 1)Realization of a on wafer calibration kit allowing to execute both the LAR calibration and the Multiline TRL calibration which is considered as the reference calibration for on wafer measurements. 2)Development of a new method in order to estimate the errors due to the fact that the input and output impedances of the standard attenuator is different from 50 Ω. This solution is very efficient and it does not require an accurate determination of the reference impedance of the LAR calibration technique. 3)Development of an original method for determining the input and output impedances of the LAR calibration procedure leading to a precise measurement of the reference impedance. 4)Realization of a calibration kit for users, with three different methods to determine the reference impedance. ● Electrical model of the standard attenuator. ● Polynomial interpolation of the reference impedance measurement. ● Development of a new simplified and low cost technique named the LAR-L procedure. 5)Analysis of errors when the substrate of the calibration kit is different from the substrate of the device under test. In order to reduce these errors, we proposed a solution to determine the coupling capacitance at the probe tip. For this purpose, a well-known transmission line is realized on the wafer of the device under test.
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Submitted on : Friday, February 18, 2011 - 9:29:11 AM
Last modification on : Friday, July 31, 2020 - 10:44:07 AM
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  • HAL Id : pastel-00567066, version 1



Mebrouk Bahouche. Etude et Traçabilité du calibrage " Line - Attenuator - Reflect", pour les mesures sous pointes à l'aide d'un analyseur de réseau vectoriel. Electronique. Télécom ParisTech, 2010. Français. ⟨pastel-00567066⟩



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