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Silicon surface passivation and epitaxial growth on c-Si by low temperature plasma processes for high efficiency solar cells

Abstract : This thesis presents a work which has been devoted to the growth of silicon thin films on crystalline silicon for photovoltaic applications by means of RF PECVD. The primary goal of this work was to obtain an amorphous growth on any c-Si surface in order to provide an efficient passivation, as required in heterojunction solar cells. Indeed, we demonstrated that epitaxial or mixed phase growths, easy to obtain on (100) Si, would lead to poor surface passivation. We proved that growing a few nm thin a-Si1-xCx:H alloy film was an efficient, stable and reproducible way to hinder epitaxy while keeping an excellent surface passivation by the subsequent deposition of a-Si:H films. Process optimization mainly based on Spectroscopic Ellipsometry, Effective lifetime measurements (Sinton lifetime tester) and current-voltage characterization led us to demonstrate that it was possible to obtain a-Si:H/c-Si heterojunction solar cells with stable VOC of 710 mV and FF of 76 % on flat (n) c-Si wafers, with solar cells of 25 cm2 whose metallization was realized by screen-printing technology. This work has also demonstrated the viability of a completely dry process where the native oxide is removed by SiF4 plasma etching instead of the wet HF removal. Last but not least, the epitaxial growth of silicon thin films, undoped and n or p-type doped, on (100)-oriented surfaces has been studied by Spectroscopic Ellipsometry and Hall effect measurements. We have been able to fabricate homojunction solar cells with a p-type emitter as well as p-i-n structures with an undoped epitaxial absorber on a heavily-doped (p) c-Si wafers.
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https://pastel.archives-ouvertes.fr/pastel-00611652
Contributor : Martin Labrune <>
Submitted on : Tuesday, July 26, 2011 - 6:23:19 PM
Last modification on : Wednesday, March 27, 2019 - 4:20:03 PM
Long-term archiving on: : Sunday, December 4, 2016 - 12:57:54 PM

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  • HAL Id : pastel-00611652, version 1

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Martin Labrune. Silicon surface passivation and epitaxial growth on c-Si by low temperature plasma processes for high efficiency solar cells. Micro and nanotechnologies/Microelectronics. Ecole Polytechnique X, 2011. English. ⟨pastel-00611652⟩

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