Etude et réalisation de transistors à nanotubes de carbone pour la détection sélective de gaz.

Abstract : This work focuses on sensor based on carbon nanotube field effect transistors (i.e. CNTFETs) modulated chemically. This new generation of sensors has many advantages: compact and inexpensive, they can be integrated in ultrasensitive and autonomous detection systems. The civilian security market is targeted, particularly punctual and network detection of warfare and explosive agent. In order to achieve a scalable and highly reproducible fabrication, which is not possible for a single carbon nanotube transistor, we propose to achieve CNTFETs using random mats of Single Wall carbon nanotubes (CNT). The first part of our work has dealt with the development of a deposition method of CNT mats using an airbrush technique assisted by an automated robot. Commercial carbon nanotubes powders are dispersed in a specific solvent and then deposited randomly by atomization of micro droplets on a hot substrate. The random mats obtained with this technique are extremely uniform (density) and allow to achieve arrays of CNTFETs with reproducible electrical characteristics. The second part has concerned the development of an array of CNTFETs with different metal electrodes (platinum, palladium, gold, nickel, titanium) to address the problem of selectivity of this kind of device. We identify a sort of electronic fingerprinting exploiting the specific interaction of each gas with each metal/SWCNTs junction. This interaction changes in an extremely specific way the transfer characteristics of the CNTFETs. We have demonstrated a sensitivity and selectivity to ammonia, nitrogen dioxide, and dimethyl methylphosphonate (sarin gas simulant) and hydrogen peroxide. These devices, thanks to their relatively low cost fabrication and high selectivity, have the potential to strike the market within a few years.
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Louis Gorintin. Etude et réalisation de transistors à nanotubes de carbone pour la détection sélective de gaz.. Micro et nanotechnologies/Microélectronique. Ecole Polytechnique X, 2011. Français. ⟨pastel-00695013⟩

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