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Méthode de modélisation et de commande des systèmes de positionnement multi-actionnés de type axe en Gantry

Ivan Mauricio Garciaherreros 1 
1 L2EP - Équipe Commande
L2EP - Laboratoire d’Électrotechnique et d’Électronique de Puissance - ULR 2697
Abstract : Gantry stages are used for high-speed high-precision motion control applications such as wafer and flat panel display manufacturing and inspection. A gantry stage is a type of Cartesian manipulator that is composed of three linear actuators on its basic configuration. Two actuators move in tandem a cross-arm along the longitudinal direction of the work-space. The third actuator, mounted on the cross-arm, carries the payload along the transverse direction of the workspace. The positioning performance of the gantry stage is principally degraded by the mechanical coupling between actuators and by the vibrations of the cross-arm along the longitudinal direction. To solve the vibration problem, the current solution is to make the cross-arm very rigid. The drawback of this solution is that rigidity is generally synonym of heaviness, which leads to the use of more powerful actuators and higher energy consumption. To solve the coupling problem, the current industrial solution is independent axis control. That is, the coupling between actuators is ignored, leading to a degraded position performance. State of the art solutions put in evidence a general lack of interest in considering the physical causes of the coupling and vibration problems into the controller design, leading to complex control architectures derived from advanced control techniques. The approach presented in this PhD. Thesis is meant to be an alternative to such techniques by proposing a methodology that is based on a detailed physical modeling of gantry stages (flexibility of the cross-arm included). This physical modeling, associated to experimental identification methods, is exploited to obtain adapted control structures and tuning methods allowing to enhance the system's performance by improving the management of its degrees of freedom. Experimental results show that the proposed methodology leads to an improved motion control of the point-tool, even for very flexible systems.
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Submitted on : Monday, June 4, 2012 - 11:28:01 AM
Last modification on : Wednesday, September 21, 2022 - 3:16:43 PM
Long-term archiving on: : Wednesday, September 5, 2012 - 2:26:11 AM


  • HAL Id : pastel-00703721, version 1


Ivan Mauricio Garciaherreros. Méthode de modélisation et de commande des systèmes de positionnement multi-actionnés de type axe en Gantry. Automatique / Robotique. Arts et Métiers ParisTech, 2012. Français. ⟨NNT : 2012ENAM0015⟩. ⟨pastel-00703721⟩



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