Elaboration et Caractérisation de revêtements à base de nitrure de chrome par pulvérisation cathodique magnétron en condition réactive : propriétés mécaniques et tribologiques

Abstract : Develop and optimize new materials are still among the issues to improve the performance of the durability of materials.The field of surface treatments and nanotechnology used to produce thin film coatings specifically physical vapor deposition (PVD) allow the synthesis of new materials that can withstand harsh conditions in various applications.The cutting tool industry and more specifically the wood in our case require more synthesis of new materials and nanomaterials to improve the serviceability of cutting tools.The aim of the present work is to develop and characterize coatings with the base material is chromium and / or silicon and optimize them. The preparation was carried out by different methods : the magnetron sputtering radio frequency RF or direct current mode DC. In addition, RGPP (reactive gas pulsing process) was used for the first time in this work which aims to overcome the difficulties of sputtering in reactive environment.Different characteristics of the layers were studied and correlated with the physicochemical and microstructural characteristics.It turns out that the direct current sputtering method proves its importance in obtaining layers of better quality than those obtained by radio-frequency mode. For similar nitrogen content, greater mechanical and tribological properties were obtained. We note that the mechanical properties realize a gain of 60% compared to those obtained in RF mode. Further adjustment of parameters RGPP method (duty cycle and pulse period) significantly influences the characteristics of the layers obtained and shown to improve the performance of layers. Following the pulsed injection of the reactive gas, it is shown that the alternation between the opening and the cutting of the valve of the reactive gas is essential for deposition in a reactive environment to remove the metal compounds on targets obtained during deposition.Finally, the addition of silicon in CrN films leads to obtain solid solutions or nanocomposite structure according to the content of silicon in the layer which implies an improvement of the mechanical and tribological properties.The contribution of this thesis is to present a comprehensive study on the performance of CrN layers and CrSiN correlating mechanical and tribological characteristics with physical deposition parameters by adopting various methods of preparation.
Keywords : Thin films
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Amel Zairi. Elaboration et Caractérisation de revêtements à base de nitrure de chrome par pulvérisation cathodique magnétron en condition réactive : propriétés mécaniques et tribologiques. Autre. Ecole nationale supérieure d'arts et métiers - ENSAM, 2013. Français. ⟨NNT : 2013ENAM0052⟩. ⟨pastel-00996656⟩

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