Development of efficient permeation barriers based on hot-wire CVD grown silicon-nitride multilayers for organic devices deposited on flexible substrates

Abstract : Efficient gas-diffusion (permeation) barriers are needed for organic optoelectronic devices because the presence of moisture or oxygen can cause strong degradation. In order for these devices to operate continuously during a long term, so to be commercialized, a reliable flexible thin film encapsulation is required, which is a major challenge. Very low water vapor transmission rates of the order of 10-5 g/m2.day are required. To reach this goal two ways have been adopted: on one hand fabricating SiNx:H / SiNx:H multilayer barriers separated by a specific Ar plasma treatment, on the other hand fabricating the conventional inorganic/organic hybrid multilayer moisture barriers. We have chosen hot-wire chemical vapor deposition (HW-CVD) as the main technique for depositing the inorganic layers and a large part of our efforts has been devoted to the complete study of the parameters controlling the plasma treatment: the energy of the ions impinging the inorganic surfaces was crucial. Several analytical (morphological, structural, optical, electrical) techniques have been necessary to assess qualitatively and quantitatively the different layers composing the moisture barriers. A physical interpretation of the plasma process treatment has been given, based on the interface atomic rearrangements induced by the low energy ions (< 40 eV). For each way of encapsulation, we have obtained very low water vapor transmission rates (4 to 7 × 10-5 g/m2.day). Combining above two encapsulation methods, we have achieved extremely low WVTR rate (6 × 10-6 g/m2.day), which seems sufficient for the utilization of organic electronic devices.
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Submitted on : Wednesday, September 24, 2014 - 1:13:38 PM
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Subimal Majee. Development of efficient permeation barriers based on hot-wire CVD grown silicon-nitride multilayers for organic devices deposited on flexible substrates. Materials Science [cond-mat.mtrl-sci]. Ecole Polytechnique X, 2014. English. ⟨pastel-01067937⟩

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