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ÉTUDE ET ÉLABORATION DE REVÊTEMENTS MULTICOUCHES POUR L'OPTIQUE EXTRÊME UV
DANS LA GAMME SPECTRALE 30-50 NM

Julien Gautier 1
1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
LCFIO - Laboratoire Charles Fabry de l'Institut d'Optique
Abstract : The development of new multilayer interferential coatings is justified by the request of solar astrophysics and the development of new EUV sources (High harmonics generation, laser X, synchrotron radiation). We have studied and developed various multilayer systems with optimized optical properties (reflectivity and/or band-width) and good temporal and thermal stability for wavelengths ranging from 30 nm to 50 nm. Multilayer for the harmonic selection were optimized and used for the realization of an EUV interferometer. A significant increase in the reflectivity of multilayer in the spectral range from 30 nm to 40 nm was obtained by the addition of a third material in the stack. A comparative study of theoretical and experimental reflectivity curves versus the wavelength was made. The differences observed have been explained by using the analysis of the physical properties of various materials in thin layer. We have also shown that the use of these three component multilayers allows the development of stack for specific requests (broadband mirrors, dual band mirrors). For wavelengths ranging from 35 nm to 50 nm we have developed Sc/Si multilayers. Multilayers with high reflectivity and good temporal stability have been achieved. We have improved the stability of these stacks by using interfacial barrier layers.
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Submitted on : Tuesday, February 21, 2006 - 4:34:44 PM
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Julien Gautier. ÉTUDE ET ÉLABORATION DE REVÊTEMENTS MULTICOUCHES POUR L'OPTIQUE EXTRÊME UV
DANS LA GAMME SPECTRALE 30-50 NM. Matière Condensée [cond-mat]. Université Paris Sud - Paris XI, 2005. Français. ⟨tel-00011659⟩

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