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Développement de composants optiques asphériques avec traitement de multicouches réflectives pour l'analyse X

Aurélie Hardouin 1
1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
LCFIO - Laboratoire Charles Fabry de l'Institut d'Optique
Abstract : X-ray analysis of low-Z elements by electron microprobe (EPMA : Electron Probe MicroAnalysis) with emission lines in the spectral range between 180 and 550 eV, requires analyzer crystals based on the use of interferential multilayer coatings. Aspherical optical components, such as ellipsoids of revolution, permit to focus X-rays on two dimensions in a single reflection, thereby collecting more flux and achieving lower detection limits than the currently used optical components. We have studied and developed multilayer systems, designed to reflect the nitrogen, boron and oxygen Ka emission lines, having both good optical properties, good temporal and thermal stability, as well as a good mechanical behaviour. The Cr/Sc multilayers developed for the nitrogen Ka emission line reached maximum reflectivities of 37% and have proved very good thermal and temporal stabilities. In order to improve the analyzers performances, we have developed antireflective coatings in the XUV range, in order to optimize the signal to noise ratio.The very good results achieved have led to the development of aspherical optical components. To do so, the multilayer coating requires a period gradient profile, in order to compensate the incidence angle variation on the optic. The process development has permitted to produce several prototypes of EPMA optics for the detection of the nitrogen Ka emission line.
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Aurélie Hardouin. Développement de composants optiques asphériques avec traitement de multicouches réflectives pour l'analyse X. Matière Condensée [cond-mat]. Université Paris Sud - Paris XI, 2007. Français. ⟨tel-00265515⟩

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