Métrologie dimensionnelle de nanoparticules mesurées par AFM et par MEB

Abstract : This works concerns the measurements of nanoparticles size by Atomic Force Mirocrsopy (AFM) and Scanning Electron Mircroscopy (SEM). Measurements methods for nanoparticle sizing are explained for both instruments. A sampling technique using a spin coater is adapted to disperse nanoparticles on a substrate and to be available for AFM and SEM. A full uncertainty budget associated to the nanoparticle sizing by AFM is given. Main uncertainty sources linked to the sizing of sperical nanoparticle by SEM is also listed. A home-made software developed under Matlab for the measurement of the size of nanoparticles imaged by AFM and by SEM is presented. This software permit the semi-automatic treatment of images. Finally, comparaisons between size measurements of spherical nanoparticles by AFM and SEM are made and valid the three dimensions size measurement principle called hybrid metrology using this both microscopy techniques.
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Submitted on : Monday, January 12, 2015 - 5:49:57 PM
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Delvallée Alexandra. Métrologie dimensionnelle de nanoparticules mesurées par AFM et par MEB. Chimie-Physique [physics.chem-ph]. ENSTA ParisTech, 2014. Français. ⟨tel-01102461⟩

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