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Matrices de détecteurs infrarouge en CdHgTe courbes : mise en forme hémisphérique et propriétés optoélectroniques induites

Abstract : At the optoelectronics and optical systems conception boundary, focal plane arrays have a planar shape because of microelectronics technologies. Yet spherical focal plane arrays would simplify optical systems conception and reduce volume, weight and total cost. This shape is widespread in Nature - human concave eye, arthropods convex compound eyes, etc.The advantages of the bio-inspired curved retina have been established in previous works, where a spherical infrared microbolometers array was manufactured.During this thesis, the silicium-based devices curving proccess (e.g. bolometers) has been optimised thanks to a design of experiments and a finite element simulation including silicium anisotropy. Convex and concave shapes without defects (folds and flat part) have been demonstrated with square and rectangular chips due to their flexibility at small thicknesses.Then, a new and different curving proccess for hybrid devices (flip-chip) was developed. Several curved CdHgTe focal plane arrays were obtained and fully fonctionnal. Concave and convex spherical shapes as well as concave cylindrical shapes have been successfully achieved despite a high CdHgTe fragility.Optoelectronic measurements such as photonic current, responsivity, noise and dark current were performed with some adaptation for curved devices. High operabilities have been demonstrated (> 97 %). In addition a finite element simulation of the proccess has been conducted with the CdHgTe anisotropy. Direct relations between induced stress and strain, and optoelectronic properties, have been proved in this II-VI semiconductor. Location and surfacing of slip lines as well as dislocations identification are discussed.Finally, a compact infrared camera prototype with a curved CdHgTe focal plane array has been manufactured for the first time. It confirms that the device is fully fonctionnal and has a great potential for high value applications.
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Submitted on : Friday, May 15, 2015 - 4:02:05 PM
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Kévin Tékaya. Matrices de détecteurs infrarouge en CdHgTe courbes : mise en forme hémisphérique et propriétés optoélectroniques induites. Science des matériaux [cond-mat.mtrl-sci]. Ecole Nationale Supérieure des Mines de Paris, 2014. Français. ⟨NNT : 2014ENMP0081⟩. ⟨tel-01152234⟩



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