Simulation et conception de microsources infrarouges nanophotoniques pour la détection de gaz

Anthony Lefebvre 1
1 Laboratoire Charles Fabry / Naphel
LCF - Laboratoire Charles Fabry
Abstract : Joule-heated suspended microhotplates can be used as infrared sources in cheap, low-consumption spectroscopic gas sensors. To enhance the very low efficiency of first generation structures, both their thermal and optical designs have to be optimized.The implementation of frustrated plasmonic resonators on top of the membrane grants both spectral and angular control of its emissivity. It is thus possible to make it radiate only at the frequencies absorbed by the gas under study, and in the solid angle of the detector. This leads to an increase in useful radiated power while the overall electrical consumption is decreased.Dynamical studies of membrane heating provide welcome insight on the relationship between membrane radius, heating time and energy consumption per measurement. The existence of a compromise is demonstrated in order to maximize the radiative efficiency, and its physical interpretation is detailed.Eventually, membranes fabricated in LETI’s clean room were characterized to measure their electrical, optical and mechanical properties. The implementation of such sources in a CO2 prototype sensor led to state-of-the-art results, with a few dozen ppm sensitivity with a power consumption of only one milliwatt.
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Anthony Lefebvre. Simulation et conception de microsources infrarouges nanophotoniques pour la détection de gaz. Optique [physics.optics]. Université Paris-Saclay, 2015. Français. ⟨NNT : 2015SACLO002⟩. ⟨tel-01274342⟩

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