STUDY OF IN-PLANE SILICON NANOWIRES OBTAINED VIA A SOLID-LIQUID-SOLID GROWTH PROCESS AND THEIR SELF- ORGANIZATION FOR ELECTRONIC APPLICATIONS

Abstract : This is the first Ph.D. thesis on studying the growth of in-plane silicon nanowires (SiNWs) and developing a method for self-organising them for nano-electronics applications. The growth of in-plane SiNWs is based on plasma-enhanced chemical vapour deposition (PECVD) thin film techniques and results from the interaction between a metal droplet and a hydrogenated amorphous silicon (a-Si:H) thin film. This in-plane solid-liquid-solid (IPSLS) growth mode can be considered as a reactive-spreading and moving behaviour of indium droplet on a-Si:H activated by the establishment of a surface energy gradient due to the phase transition from a-Si:H at the advancing NP edge to c-Si at the NP receding edge. In order to integrate IPSLS SiNWs in nano-electronic devices it is of prime importance to organise them in a controllable way. We propose a growth-in-place strategy which enables the SiNWs to grow along pre-patterned guiding steps. Moreover, this technique is applied to form In NPs on the sidewall of buried ITO layers, which facilitates the localization of the step-guided SiNWs. This work sets the basis for the fabrication of SiNW field effect transistors on insulator, which also allows for gate engineering and the obtaining of Fully Depleted Silicon-On-Insulator (FD-SOI).
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Contributor : Zheng Fan <>
Submitted on : Monday, May 2, 2016 - 8:03:51 PM
Last modification on : Wednesday, March 27, 2019 - 4:20:04 PM
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  • HAL Id : tel-01310585, version 1

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Zheng Fan. STUDY OF IN-PLANE SILICON NANOWIRES OBTAINED VIA A SOLID-LIQUID-SOLID GROWTH PROCESS AND THEIR SELF- ORGANIZATION FOR ELECTRONIC APPLICATIONS. Materials Science [cond-mat.mtrl-sci]. Ecole Polytechnique, 2015. English. ⟨tel-01310585⟩

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