Modeling of a silane-hydrogen plasma discharge including nanoparticle dynamics for photovoltaic applications.

Abstract : This thesis addresses the modeling of silicon nanoparticle dynamics in radio-frequency capacitively-coupled silane plasma discharges for photovoltaic applications.A complete derivation of fluid equations for a two-temperature reactive polyatomic plasma has been achieved in the framework of the kinetic theory of gases. From an asymptotic analysis of the Boltzmann equation, the Chapman-Enskog method was applied to derive the zeroth-order “Euler-type” equations and the first-order “Navier-Stokes-type” equations. Expressions for transport fluxes have been obtained in terms of the macroscopic variables gradients, and associated transport coefficients have been derived.The multicomponent fluid plasma model thus derived has been simplified and implemented numerically in order to model a plasma enhanced chemical vapor deposition reactor as used for silicon thin films deposition. A software has been written in FORTRAN and validated against a benchmark model from the literature. The plasma model has then been applied to typical conditions for low temperature plasma enhanced silicon epitaxy. The main plasma species densities are in good agreement with existing experimental data. The influence of silane plasma chemistry on the DC bias voltage has also been investigated using “tailored voltage” asymmetric waveforms.The model has then been enriched with a sectional model accounting for size and charge of nanoparticles. An estimation of the accommodation coefficient of silane on nanoparticles was obtained from a comparison with existing experimental results. Results of the simulations confirm the critical role of positive ions in the deposition process.The model implemented in this work opens the path for a systematic study of the evolution of the plasma properties as a function of the process conditions and of the influence of nanoparticles on the plasma physicochemical properties.
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Jean-Maxime Orlac'H. Modeling of a silane-hydrogen plasma discharge including nanoparticle dynamics for photovoltaic applications.. Plasma Physics [physics.plasm-ph]. Université Paris-Saclay, 2017. English. ⟨NNT : 2017SACLX023⟩. ⟨tel-01643702⟩

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