Development and improvement of embedded structures in microelectronic chips : Study of mechanical and electrical contact

Abstract : In recent years the miniaturization of microsystems is reaching the physical limit of its development. Thus, a path of innovation in the semiconductor industry is additional functionalities in existing components.The project consists to integrate a MEMS, within the same metal interconnect of CMOS layer which, by rotating, can establish an electrical contact.The obstacles are in the release of the moving parts by dissolution of the surrounding oxide (out of plane deformation under the effect of residual stress, stiction, residues which prevent contact), in the actuation (current density repeatability, durability, reliability) and, for ohmic switches, the ability to establish a real electrical contact with low resistance (real / apparent area of contact with rough surfaces, contact pollution).The work carried out has focused on conception (design) and simulation of microsystems to overcome these difficulties and / or to study the behavior and measure the effects.
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Sebastian Orellana. Development and improvement of embedded structures in microelectronic chips : Study of mechanical and electrical contact. Micro and nanotechnologies/Microelectronics. PSL Research University, 2016. English. ⟨NNT : 2016PSLEM070⟩. ⟨tel-01709704⟩

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