Microscope X dans la fenêtre de l’eau : conception, miroirs à revêtements multicouches et métrologie associée

Catherine Burcklen 1
1 Laboratoire Charles Fabry / Optique XUV
LCF - Laboratoire Charles Fabry
Abstract : The observation of biological samples at a nanometer scale is currently a major topic for biology. In particular, X-ray microscopy in the water-window (between Oxygen and Carbon K-alpha edges, corresponding to a wavelength between 2.4 and 4.4 nm) is off remarkable interest since it enables the visualization of biological samples with a natural high absorption contrast and a high resolution thanks to the short working wavelength. Several such x-ray microscopes have already been developed and showed resolutions down to 12 nm. In this context, we develop at Laboratoire Charles Fabry a full field, near normal incidence mirror based X-ray microscope. The optical design of the microscope was studied and optimized in a first place. It is based on a Schwarzschild objective, with a rather long working distance so that the installation of the sample will be facilitated. The mirrors are to be coated with very short period multilayer coatings containing chromium and scandium. Several multilayer systems with sub-nanometer thick layers ere studied in order to obtain the highest reflectance possible near normal incidence at a wavelength near 3.14 nm. Those systems were Cr/Sc, Cr/B4C/Sc, CrN/Sc and CrN/B4C/Sc. A peak reflectance of 23% has been measured for CrN/B4C/Sc at an incidence angle lower than 5°.
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Catherine Burcklen. Microscope X dans la fenêtre de l’eau : conception, miroirs à revêtements multicouches et métrologie associée. Optique [physics.optics]. Université Paris-Saclay, 2017. Français. ⟨NNT : 2017SACLO002⟩. ⟨tel-01468600v2⟩

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